Total properties:
617
Page
5
of
7
Pages:
1 2 3 4 5 6 7
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2016
|
Application #:
|
13457278
|
Filing Dt:
|
04/26/2012
|
Publication #:
|
|
Pub Dt:
|
11/29/2012
| | | | |
Title:
|
Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/2015
|
Application #:
|
13464923
|
Filing Dt:
|
05/04/2012
|
Publication #:
|
|
Pub Dt:
|
12/20/2012
| | | | |
Title:
|
Narrow Width Loadport Mechanism for Cleanroom Material Transfer Systems
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2015
|
Application #:
|
13475723
|
Filing Dt:
|
05/18/2012
|
Publication #:
|
|
Pub Dt:
|
12/20/2012
| | | | |
Title:
|
DYNAMIC STORAGE AND TRANSFER SYSTEM INTEGRATED WITH AUTONOMOUS GUIDED/ROVING VEHICLE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/07/2018
|
Application #:
|
13531500
|
Filing Dt:
|
06/23/2012
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/09/2018
|
Application #:
|
13531501
|
Filing Dt:
|
06/23/2012
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/15/2014
|
Application #:
|
13531502
|
Filing Dt:
|
06/23/2012
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2017
|
Application #:
|
13531503
|
Filing Dt:
|
06/23/2012
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
SEMICONDUCTOR CLEANER SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2017
|
Application #:
|
13531504
|
Filing Dt:
|
06/23/2012
|
Publication #:
|
|
Pub Dt:
|
12/27/2012
| | | | |
Title:
|
Semiconductor cleaner systems and methods
|
|
|
Patent #:
|
|
Issue Dt:
|
01/03/2017
|
Application #:
|
13537009
|
Filing Dt:
|
06/28/2012
|
Publication #:
|
|
Pub Dt:
|
01/03/2013
| | | | |
Title:
|
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2016
|
Application #:
|
13537016
|
Filing Dt:
|
06/28/2012
|
Publication #:
|
|
Pub Dt:
|
01/03/2013
| | | | |
Title:
|
Semiconductor stocker systems and methods
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/2021
|
Application #:
|
13537022
|
Filing Dt:
|
06/28/2012
|
Publication #:
|
|
Pub Dt:
|
01/03/2013
| | | | |
Title:
|
A ROBOT WITH GAS FLOW SENSOR COUPLED TO ROBOT ARM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2018
|
Application #:
|
13537031
|
Filing Dt:
|
06/28/2012
|
Publication #:
|
|
Pub Dt:
|
01/03/2013
| | | | |
Title:
|
Semiconductor Stocker Systems And Methods
|
|
|
Patent #:
|
|
Issue Dt:
|
11/17/2015
|
Application #:
|
13547786
|
Filing Dt:
|
07/12/2012
|
Publication #:
|
|
Pub Dt:
|
01/17/2013
| | | | |
Title:
|
COMPACT DIRECT DRIVE SPINDLE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/09/2018
|
Application #:
|
13557223
|
Filing Dt:
|
07/25/2012
|
Publication #:
|
|
Pub Dt:
|
01/24/2013
| | | | |
Title:
|
Simultaneous wafer ID reading
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2018
|
Application #:
|
13561873
|
Filing Dt:
|
07/30/2012
|
Publication #:
|
|
Pub Dt:
|
01/31/2013
| | | | |
Title:
|
FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
|
|
|
Patent #:
|
|
Issue Dt:
|
03/25/2014
|
Application #:
|
13567812
|
Filing Dt:
|
08/06/2012
|
Publication #:
|
|
Pub Dt:
|
11/29/2012
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2014
|
Application #:
|
13605941
|
Filing Dt:
|
09/06/2012
|
Publication #:
|
|
Pub Dt:
|
03/06/2014
| | | | |
Title:
|
ACCESS ARBITRATION MODULE AND SYSTEM FOR SEMICONDUCTOR FABRICATION EQUIPMENT AND METHODS FOR USING AND OPERATING THE SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2014
|
Application #:
|
13616683
|
Filing Dt:
|
09/14/2012
|
Publication #:
|
|
Pub Dt:
|
05/16/2013
| | | | |
Title:
|
SEMICONDUCTOR MANUFACTURING PROCESS MODULE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2014
|
Application #:
|
13617171
|
Filing Dt:
|
09/14/2012
|
Publication #:
|
|
Pub Dt:
|
03/21/2013
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/21/2014
|
Application #:
|
13617333
|
Filing Dt:
|
09/14/2012
|
Publication #:
|
|
Pub Dt:
|
04/04/2013
| | | | |
Title:
|
WAFER CENTER FINDING WITH KALMAN FILTER
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/2015
|
Application #:
|
13625442
|
Filing Dt:
|
09/24/2012
|
Publication #:
|
|
Pub Dt:
|
04/11/2013
| | | | |
Title:
|
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2014
|
Application #:
|
13625704
|
Filing Dt:
|
09/24/2012
|
Publication #:
|
|
Pub Dt:
|
03/28/2013
| | | | |
Title:
|
LOAD LOCK FAST PUMP VENT
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
13632229
|
Filing Dt:
|
10/01/2012
|
Publication #:
|
|
Pub Dt:
|
01/31/2013
| | | | |
Title:
|
Transfer mechanism with multiple wafer handling capability
|
|
|
Patent #:
|
|
Issue Dt:
|
05/05/2015
|
Application #:
|
13646282
|
Filing Dt:
|
10/05/2012
|
Publication #:
|
|
Pub Dt:
|
01/31/2013
| | | | |
Title:
|
ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2014
|
Application #:
|
13692749
|
Filing Dt:
|
12/03/2012
|
Publication #:
|
|
Pub Dt:
|
12/19/2013
| | | | |
Title:
|
TRANSPORT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/17/2015
|
Application #:
|
13703234
|
Filing Dt:
|
12/10/2012
|
Publication #:
|
|
Pub Dt:
|
03/28/2013
| | | | |
Title:
|
INVENTORY MONITORING OF LIVE-STORAGE SYSTEMS BY MEANS OF RFID
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/2015
|
Application #:
|
13739831
|
Filing Dt:
|
01/11/2013
|
Publication #:
|
|
Pub Dt:
|
07/17/2014
| | | | |
Title:
|
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/2014
|
Application #:
|
13740257
|
Filing Dt:
|
01/13/2013
|
Title:
|
INTEGRATED GRIPPER FOR WORKPIECE TRANSFER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2014
|
Application #:
|
13764373
|
Filing Dt:
|
02/11/2013
|
Publication #:
|
|
Pub Dt:
|
09/05/2013
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/2015
|
Application #:
|
13768495
|
Filing Dt:
|
02/15/2013
|
Publication #:
|
|
Pub Dt:
|
02/27/2014
| | | | |
Title:
|
DUAL SCARA ARM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/17/2017
|
Application #:
|
13830692
|
Filing Dt:
|
03/14/2013
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
TRAY ENGINE WITH SLIDE ATTACHED TO AN END EFFECTOR BASE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2019
|
Application #:
|
13861693
|
Filing Dt:
|
04/12/2013
|
Publication #:
|
|
Pub Dt:
|
09/05/2013
| | | | |
Title:
|
LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/23/2015
|
Application #:
|
13863354
|
Filing Dt:
|
04/15/2013
|
Publication #:
|
|
Pub Dt:
|
11/14/2013
| | | | |
Title:
|
Substrate carrier having drip edge configurations
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2017
|
Application #:
|
13908909
|
Filing Dt:
|
06/03/2013
|
Publication #:
|
|
Pub Dt:
|
12/19/2013
| | | | |
Title:
|
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/18/2014
|
Application #:
|
13914397
|
Filing Dt:
|
06/10/2013
|
Publication #:
|
|
Pub Dt:
|
12/26/2013
| | | | |
Title:
|
MANIPULATOR AUTO-TEACH AND POSITION CORRECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2018
|
Application #:
|
14014910
|
Filing Dt:
|
08/30/2013
|
Publication #:
|
|
Pub Dt:
|
12/26/2013
| | | | |
Title:
|
SEMICONDUCTOR MANUFACTURING SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2017
|
Application #:
|
14042248
|
Filing Dt:
|
09/30/2013
|
Publication #:
|
|
Pub Dt:
|
05/29/2014
| | | | |
Title:
|
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/2016
|
Application #:
|
14058436
|
Filing Dt:
|
10/21/2013
|
Publication #:
|
|
Pub Dt:
|
02/13/2014
| | | | |
Title:
|
COMPACT SUBSTRATE TRANSPORT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
14071314
|
Filing Dt:
|
11/04/2013
|
Publication #:
|
|
Pub Dt:
|
05/08/2014
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/14/2014
|
Application #:
|
14088345
|
Filing Dt:
|
11/23/2013
|
Publication #:
|
|
Pub Dt:
|
03/13/2014
| | | | |
Title:
|
INTEGRATED CLEANER AND DRYER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2017
|
Application #:
|
14089439
|
Filing Dt:
|
11/25/2013
|
Publication #:
|
|
Pub Dt:
|
08/18/2016
| | | | |
Title:
|
SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2019
|
Application #:
|
14148785
|
Filing Dt:
|
01/07/2014
|
Publication #:
|
|
Pub Dt:
|
05/01/2014
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER
|
|
|
Patent #:
|
|
Issue Dt:
|
01/13/2015
|
Application #:
|
14159223
|
Filing Dt:
|
01/20/2014
|
Publication #:
|
|
Pub Dt:
|
07/24/2014
| | | | |
Title:
|
WAFER CENTER FINDING WITH KALMAN FILTER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2019
|
Application #:
|
14161039
|
Filing Dt:
|
01/22/2014
|
Publication #:
|
|
Pub Dt:
|
07/24/2014
| | | | |
Title:
|
SUBSTRATE TRANSPORT
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/2017
|
Application #:
|
14180876
|
Filing Dt:
|
02/14/2014
|
Publication #:
|
|
Pub Dt:
|
06/12/2014
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2017
|
Application #:
|
14181707
|
Filing Dt:
|
02/16/2014
|
Publication #:
|
|
Pub Dt:
|
06/12/2014
| | | | |
Title:
|
Integrated gripper for workpiece transfer
|
|
|
Patent #:
|
|
Issue Dt:
|
10/25/2016
|
Application #:
|
14195086
|
Filing Dt:
|
03/03/2014
|
Publication #:
|
|
Pub Dt:
|
06/26/2014
| | | | |
Title:
|
LOAD LOCK CHAMBER
|
|
|
Patent #:
|
|
Issue Dt:
|
02/06/2018
|
Application #:
|
14216829
|
Filing Dt:
|
03/17/2014
|
Publication #:
|
|
Pub Dt:
|
07/17/2014
| | | | |
Title:
|
SEMICONDUCTOR WAFER HANDLING TRANSPORT
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2018
|
Application #:
|
14220076
|
Filing Dt:
|
03/19/2014
|
Publication #:
|
|
Pub Dt:
|
09/25/2014
| | | | |
Title:
|
Tool compiler
|
|
|
Patent #:
|
|
Issue Dt:
|
06/14/2016
|
Application #:
|
14223553
|
Filing Dt:
|
03/24/2014
|
Publication #:
|
|
Pub Dt:
|
11/20/2014
| | | | |
Title:
|
ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/14/2015
|
Application #:
|
14251564
|
Filing Dt:
|
04/11/2014
|
Publication #:
|
|
Pub Dt:
|
08/07/2014
| | | | |
Title:
|
Semiconductor cleaner systems and methods
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14274679
|
Filing Dt:
|
05/10/2014
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
Methods and apparatuses for roll-on coating
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14274771
|
Filing Dt:
|
05/12/2014
|
Publication #:
|
|
Pub Dt:
|
10/02/2014
| | | | |
Title:
|
Methods and apparatuses for roll-on coating
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14294141
|
Filing Dt:
|
06/02/2014
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
Methods and apparatuses for roll-on coating
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/2020
|
Application #:
|
14304996
|
Filing Dt:
|
06/16/2014
|
Publication #:
|
|
Pub Dt:
|
10/02/2014
| | | | |
Title:
|
Removable compartments for workpiece stocker
|
|
|
Patent #:
|
|
Issue Dt:
|
05/05/2020
|
Application #:
|
14305003
|
Filing Dt:
|
06/16/2014
|
Publication #:
|
|
Pub Dt:
|
10/02/2014
| | | | |
Title:
|
Removable compartments for workpiece stocker
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2019
|
Application #:
|
14305715
|
Filing Dt:
|
06/16/2014
|
Publication #:
|
|
Pub Dt:
|
10/02/2014
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/2018
|
Application #:
|
14311340
|
Filing Dt:
|
06/22/2014
|
Publication #:
|
|
Pub Dt:
|
10/09/2014
| | | | |
Title:
|
CLEAN TRANSFER ROBOT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/2016
|
Application #:
|
14318707
|
Filing Dt:
|
06/30/2014
|
Publication #:
|
|
Pub Dt:
|
11/06/2014
| | | | |
Title:
|
SCALABLE STOCKERS WITH AUTOMATIC HANDLING BUFFER
|
|
|
Patent #:
|
|
Issue Dt:
|
12/06/2016
|
Application #:
|
14325702
|
Filing Dt:
|
07/08/2014
|
Publication #:
|
|
Pub Dt:
|
01/08/2015
| | | | |
Title:
|
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2016
|
Application #:
|
14342035
|
Filing Dt:
|
05/09/2014
|
Publication #:
|
|
Pub Dt:
|
09/04/2014
| | | | |
Title:
|
TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/07/2017
|
Application #:
|
14344930
|
Filing Dt:
|
07/10/2014
|
Publication #:
|
|
Pub Dt:
|
09/03/2015
| | | | |
Title:
|
LOAD STATION
|
|
|
Patent #:
|
|
Issue Dt:
|
01/09/2018
|
Application #:
|
14353153
|
Filing Dt:
|
04/21/2014
|
Publication #:
|
|
Pub Dt:
|
09/18/2014
| | | | |
Title:
|
SEMICONDUCTOR WAFER HANDLING AND TRANSPORT
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2018
|
Application #:
|
14365277
|
Filing Dt:
|
06/13/2014
|
Publication #:
|
|
Pub Dt:
|
10/09/2014
| | | | |
Title:
|
TRANSPORT APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14377987
|
Filing Dt:
|
08/11/2014
|
Publication #:
|
|
Pub Dt:
|
01/15/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14451422
|
Filing Dt:
|
08/04/2014
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
Title:
|
Methods and apparatuses for roll-on coating
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2018
|
Application #:
|
14452490
|
Filing Dt:
|
08/05/2014
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
Title:
|
Workpiece Structures and Apparatus for Accessing Same
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/2021
|
Application #:
|
14469260
|
Filing Dt:
|
08/26/2014
|
Publication #:
|
|
Pub Dt:
|
05/14/2015
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2021
|
Application #:
|
14472678
|
Filing Dt:
|
08/29/2014
|
Publication #:
|
|
Pub Dt:
|
12/18/2014
| | | | |
Title:
|
LOAD PORT MODULE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/20/2018
|
Application #:
|
14497324
|
Filing Dt:
|
09/26/2014
|
Publication #:
|
|
Pub Dt:
|
01/08/2015
| | | | |
Title:
|
BUFFER STATION FOR STOCKER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2016
|
Application #:
|
14508974
|
Filing Dt:
|
10/07/2014
|
Publication #:
|
|
Pub Dt:
|
01/22/2015
| | | | |
Title:
|
Port Door Positioning Apparatus and Associated Methods
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2020
|
Application #:
|
14513214
|
Filing Dt:
|
10/14/2014
|
Publication #:
|
|
Pub Dt:
|
08/25/2016
| | | | |
Title:
|
Container storage add-on for bare workpiece stocker
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14517900
|
Filing Dt:
|
10/19/2014
|
Publication #:
|
|
Pub Dt:
|
10/20/2016
| | | | |
Title:
|
Cleaning Systems and Methods for Semiconductor Substrate Storage Articles
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/2020
|
Application #:
|
14530102
|
Filing Dt:
|
10/31/2014
|
Publication #:
|
|
Pub Dt:
|
02/26/2015
| | | | |
Title:
|
Access Arbitration System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same
|
|
|
Patent #:
|
|
Issue Dt:
|
12/12/2017
|
Application #:
|
14537696
|
Filing Dt:
|
11/10/2014
|
Publication #:
|
|
Pub Dt:
|
03/05/2015
| | | | |
Title:
|
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/2019
|
Application #:
|
14540055
|
Filing Dt:
|
11/13/2014
|
Publication #:
|
|
Pub Dt:
|
05/21/2015
| | | | |
Title:
|
SEALED SWITCHED RELUCTANCE MOTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/2020
|
Application #:
|
14540058
|
Filing Dt:
|
11/13/2014
|
Publication #:
|
|
Pub Dt:
|
06/09/2016
| | | | |
Title:
|
POSITION FEEDBACK FOR SEALED ENVIRONMENTS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/17/2018
|
Application #:
|
14540072
|
Filing Dt:
|
11/13/2014
|
Publication #:
|
|
Pub Dt:
|
05/21/2015
| | | | |
Title:
|
SEALED ROBOT DRIVE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/2020
|
Application #:
|
14540077
|
Filing Dt:
|
11/13/2014
|
Publication #:
|
|
Pub Dt:
|
06/18/2015
| | | | |
Title:
|
METHOD AND APPARATUS FOR BRUSHLESS ELECTRICAL MACHINE CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2018
|
Application #:
|
14541934
|
Filing Dt:
|
11/14/2014
|
Publication #:
|
|
Pub Dt:
|
06/04/2015
| | | | |
Title:
|
REDUCED CAPACITY CARRIER AND METHOD OF USE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2018
|
Application #:
|
14568742
|
Filing Dt:
|
12/12/2014
|
Publication #:
|
|
Pub Dt:
|
07/23/2015
| | | | |
Title:
|
SUBSTRATE TRANSPORT APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2016
|
Application #:
|
14569662
|
Filing Dt:
|
12/13/2014
|
Publication #:
|
|
Pub Dt:
|
06/18/2015
| | | | |
Title:
|
RECIRCULATION SUBSTRATE CONTAINER PURGING SYSTEMS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/05/2016
|
Application #:
|
14579067
|
Filing Dt:
|
12/22/2014
|
Publication #:
|
|
Pub Dt:
|
04/23/2015
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
14611697
|
Filing Dt:
|
02/02/2015
|
Publication #:
|
|
Pub Dt:
|
08/06/2015
| | | | |
Title:
|
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/24/2018
|
Application #:
|
14617052
|
Filing Dt:
|
02/09/2015
|
Publication #:
|
|
Pub Dt:
|
08/06/2015
| | | | |
Title:
|
DUAL ARM ROBOT
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/2016
|
Application #:
|
14682059
|
Filing Dt:
|
04/08/2015
|
Publication #:
|
|
Pub Dt:
|
10/15/2015
| | | | |
Title:
|
Semiconductor cleaner systems and methods
|
|
|
Patent #:
|
|
Issue Dt:
|
11/26/2019
|
Application #:
|
14698110
|
Filing Dt:
|
04/28/2015
|
Publication #:
|
|
Pub Dt:
|
01/21/2016
| | | | |
Title:
|
SCALABLE MOTION CONTROL SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
05/26/2020
|
Application #:
|
14740214
|
Filing Dt:
|
06/15/2015
|
Publication #:
|
|
Pub Dt:
|
10/01/2015
| | | | |
Title:
|
SUBSTRATE CARRIER HAVING DRIP EDGE CONFIGURATIONS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/06/2018
|
Application #:
|
14822310
|
Filing Dt:
|
08/10/2015
|
Publication #:
|
|
Pub Dt:
|
12/03/2015
| | | | |
Title:
|
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/22/2018
|
Application #:
|
14822392
|
Filing Dt:
|
08/10/2015
|
Publication #:
|
|
Pub Dt:
|
02/04/2016
| | | | |
Title:
|
SIDE OPENING UNIFIED POD
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2018
|
Application #:
|
14840359
|
Filing Dt:
|
08/31/2015
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
Title:
|
REDUNDANTABLE ROBOT ASSEMBLY FOR WORKPIECE TRANSFER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2018
|
Application #:
|
14868689
|
Filing Dt:
|
09/29/2015
|
Publication #:
|
|
Pub Dt:
|
01/21/2016
| | | | |
Title:
|
DUAL SCARA ARM
|
|
|
Patent #:
|
|
Issue Dt:
|
08/25/2020
|
Application #:
|
14928352
|
Filing Dt:
|
10/30/2015
|
Publication #:
|
|
Pub Dt:
|
05/05/2016
| | | | |
Title:
|
WAFER ALIGNER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/19/2018
|
Application #:
|
14937676
|
Filing Dt:
|
11/10/2015
|
Publication #:
|
|
Pub Dt:
|
05/12/2016
| | | | |
Title:
|
TOOL AUTO-TEACH METHOD AND APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/05/2017
|
Application #:
|
14941888
|
Filing Dt:
|
11/16/2015
|
Publication #:
|
|
Pub Dt:
|
05/19/2016
| | | | |
Title:
|
COMPACT DIRECT DRIVE SPINDLE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/09/2020
|
Application #:
|
14976952
|
Filing Dt:
|
12/21/2015
|
Publication #:
|
|
Pub Dt:
|
04/21/2016
| | | | |
Title:
|
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2017
|
Application #:
|
14988256
|
Filing Dt:
|
01/05/2016
|
Publication #:
|
|
Pub Dt:
|
05/12/2016
| | | | |
Title:
|
SUBSTRATE PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/10/2019
|
Application #:
|
15012425
|
Filing Dt:
|
02/01/2016
|
Publication #:
|
|
Pub Dt:
|
08/04/2016
| | | | |
Title:
|
UNEQUAL LINK SCARA ARM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2018
|
Application #:
|
15031334
|
Filing Dt:
|
04/22/2016
|
Publication #:
|
|
Pub Dt:
|
09/22/2016
| | | | |
Title:
|
CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE ARTICLES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/16/2018
|
Application #:
|
15095898
|
Filing Dt:
|
04/11/2016
|
Publication #:
|
|
Pub Dt:
|
10/13/2016
| | | | |
Title:
|
RECIRCULATION SUBSTRATE CONTAINER PURGING SYSTEMS
|
|