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Patent Assignment Details

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Reel/Frame:	046115/0741			Pages:	8
		Recorded:	05/09/2018
Attorney Dkt #:	113580.00002
Conveyance:	CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEES' COUNTRY NAME PREVIOUSLY RECORDED AT REEL: 044938 FRAME: 0980. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.

Total properties: 1

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Patent #:	9995569	Issue Dt:	06/12/2018	Application #:	15568118	Filing Dt:	10/20/2017
Publication #:	US20180080757	Pub Dt:	03/22/2018
Title:	SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE REGION ON SILICON WAFER STAGE

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Assignees

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TSINGHUA UNIVERSITY

POST BOX 100084 BRANCH 82

TSINGHUA UNIVERSITY, PATENT OFFICE

HAIDIAN DISTRICT, BEIJING, CHINA 100084

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BEIJING U-PRECISION TECH CO., LTD.

ROOM B1009

XUEYAN PLAZA, TUSPARK

HAIDIAN DISTRICT, BEIJING, CHINA 100084

Correspondence name and address
	HOWARD & HOWARD ATTORNEYS PLLC
	450 WEST FOURTH STREET
	ROYAL OAK, MI 48067

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