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Total properties:
17
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Patent #:
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Issue Dt:
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03/29/1988
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Application #:
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06912910
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Filing Dt:
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09/26/1986
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Title:
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LAMP HOUSING AND VENTILATING SYSTEM THEREFOR
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Patent #:
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Issue Dt:
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08/30/1988
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Application #:
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06914036
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Filing Dt:
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10/01/1986
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Title:
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TABLE STABILIZATION ASSEMBLY
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Patent #:
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Issue Dt:
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11/14/1989
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Application #:
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07038359
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Filing Dt:
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04/14/1987
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Title:
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DARK FIELD TARGET DESIGN SYSTEM FOR ALIGNMENT OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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06/13/1989
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Application #:
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07064151
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Filing Dt:
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06/18/1987
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Title:
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DUAL VOICE COIL SHUTTER
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Patent #:
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Issue Dt:
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10/23/1990
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Application #:
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07267965
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Filing Dt:
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11/07/1988
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Title:
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UNIT MAGNIFICATION OPTICAL SYSTEM
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Patent #:
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Issue Dt:
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07/16/1991
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Application #:
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07456677
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Filing Dt:
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12/27/1989
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Title:
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DEEP ULTRAVIOLET (UV) LENS FOR USE IN A PHOTOLIGHOGRAPHY SYSTEM
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Patent #:
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Issue Dt:
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03/26/1991
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Application #:
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07458482
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Filing Dt:
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12/27/1989
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Title:
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APPARATUS AND METHOD FOR ALIGNING AND FOCUSING AN IMAGE OF A RETICLE ONTO A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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08/20/1991
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Application #:
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07524891
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Filing Dt:
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05/18/1990
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Title:
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UNIT MAGNIFICATION OPTICAL SYSTEM WITH IMPROVED REFLECTIVE RETICLE
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07728343
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Filing Dt:
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07/11/1991
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Title:
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OPTICAL PROJECTION SYSTEM INCLUDING A REFRACTIVE LENS ASSEMBLY HAVING A GAP BETWEEN CONSTITUENT LENSES
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Patent #:
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Issue Dt:
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11/17/1992
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Application #:
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07729941
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Filing Dt:
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07/15/1991
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Title:
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OPTICAL RETICLE INSPECTION SYSEM AND METHOD
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07802414
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Filing Dt:
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12/04/1991
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Title:
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OPTICAL COMPONENT COUPLING AND COMPOSITION THEREFOR
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Patent #:
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Issue Dt:
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11/08/1994
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Application #:
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07819424
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Filing Dt:
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01/10/1992
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Title:
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APPARATUS FOR MEASURING A DEPARTURE FROM FLATNESS OR STRAIGHTNESS OF A NOMINALLY-PLANE MIRROR FOR A PRECISION X-Y MOVABLE-STAGE
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Patent #:
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Issue Dt:
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11/30/1993
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Application #:
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07993547
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Filing Dt:
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12/21/1992
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Title:
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FOCUSING TECHNIQUE SUITABLE FOR USE WITH AN UNPATTERNED SPECULAR SUBSTRATE
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Patent #:
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Issue Dt:
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05/31/1994
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Application #:
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07993773
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Filing Dt:
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12/18/1992
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Title:
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THICKNESS COMPENSATION ACTUATOR SYSTEM
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Patent #:
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Issue Dt:
|
03/28/1995
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Application #:
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07993795
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Filing Dt:
|
12/21/1992
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Title:
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ALIGNMENT SYSTEM FOR A HALF-FIELD DYSON PROJECTION SYSTEM
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Patent #:
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Issue Dt:
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07/12/1994
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Application #:
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07994238
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Filing Dt:
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12/21/1992
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Title:
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SYSTEM FOR ACHIEVING A PARALLEL RELATIONSHIP BETWEEN SURFACES OF WAFER AND RETICLE OF HALF-FIELD DYSON STEPPER
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Patent #:
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Issue Dt:
|
04/12/1994
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Application #:
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07994239
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Filing Dt:
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12/21/1992
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Title:
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ILLUMINATION SYSTEM FOR HALF-FIELD DYSON STEPPER
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