Total properties:
24
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Patent #:
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Issue Dt:
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12/16/2008
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Application #:
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11406216
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Filing Dt:
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04/17/2006
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Publication #:
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Pub Dt:
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11/09/2006
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Title:
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ALTERNATIVE FUELS FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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11/30/2010
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Application #:
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11505177
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Filing Dt:
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08/16/2006
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Publication #:
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Pub Dt:
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02/21/2008
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Title:
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EUV OPTICS
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Patent #:
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Issue Dt:
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02/17/2009
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Application #:
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11580414
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Filing Dt:
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10/13/2006
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Publication #:
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Pub Dt:
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04/17/2008
| | | | |
Title:
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DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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11644153
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Filing Dt:
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12/22/2006
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Publication #:
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Pub Dt:
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06/26/2008
| | | | |
Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/02/2010
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Application #:
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11786145
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Filing Dt:
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04/10/2007
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Publication #:
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Pub Dt:
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07/31/2008
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11827803
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Filing Dt:
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07/13/2007
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Publication #:
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Pub Dt:
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01/15/2009
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE HAVING A DROPLET STREAM PRODUCED USING A MODULATED DISTURBANCE WAVE
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Patent #:
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Issue Dt:
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02/02/2010
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Application #:
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11897644
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Filing Dt:
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08/31/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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GAS MANAGEMENT SYSTEM FOR A LASER-PRODUCED-PLASMA EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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12002073
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Filing Dt:
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12/14/2007
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Publication #:
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Pub Dt:
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06/18/2009
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Title:
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SYSTEM MANAGING GAS FLOW BETWEEN CHAMBERS OF AN EXTREME ULTRAVIOLET (EUV) PHOTOLITHOGRAPHY APPARATUS
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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12004905
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Filing Dt:
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12/20/2007
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Publication #:
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Pub Dt:
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06/25/2009
| | | | |
Title:
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DRIVE LASER FOR EUV LIGHT SOURCE
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Patent #:
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Issue Dt:
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06/22/2010
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Application #:
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12210012
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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SPECTRAL PURITY FILTERS AND METHODS THEREFOR
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Patent #:
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Issue Dt:
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11/22/2011
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Application #:
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12210086
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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03/18/2010
| | | | |
Title:
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BLIND MOTORIZED COUPLING ARRANGEMENTS FOR COUPLING UV LIGHT SOURCE SUBSYSTEM AND SCANNER SUBSYSTEM IN A UV LITHOGRAPHY SYSTEM AND METHODS THEREFOR
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Patent #:
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Issue Dt:
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01/18/2011
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Application #:
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12214736
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Filing Dt:
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06/19/2008
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Publication #:
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Pub Dt:
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09/17/2009
| | | | |
Title:
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SYSTEMS AND METHODS FOR TARGET MATERIAL DELIVERY IN A LASER PRODUCED PLASMA EUV LIGHT SOURCE
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|
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Patent #:
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Issue Dt:
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06/12/2012
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Application #:
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12221313
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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02/04/2010
| | | | |
Title:
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SYSTEMS AND METHODS FOR HEATING AN EUV COLLECTOR MIRROR
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|
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Patent #:
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|
Issue Dt:
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08/27/2013
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Application #:
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12221822
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Filing Dt:
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08/06/2008
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Publication #:
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Pub Dt:
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02/11/2010
| | | | |
Title:
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Debris protection system having a magnetic field for an EUV light source
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Patent #:
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|
Issue Dt:
|
01/05/2010
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Application #:
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12284585
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Filing Dt:
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09/22/2008
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Title:
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SYSTEMS AND METHODS FOR COLLECTOR MIRROR TEMPERATURE CONTROL USING DIRECT CONTACT HEAT TRANSFER
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Patent #:
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|
Issue Dt:
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10/09/2012
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Application #:
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12592107
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Filing Dt:
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11/18/2009
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Publication #:
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Pub Dt:
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05/27/2010
| | | | |
Title:
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SYSTEMS AND METHODS FOR DRIVE LASER BEAM DELIVERY IN AN EUV LIGHT SOURCE
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|
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Patent #:
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|
Issue Dt:
|
08/20/2013
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Application #:
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12927012
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Filing Dt:
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11/03/2010
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Publication #:
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Pub Dt:
|
03/10/2011
| | | | |
Title:
|
DRIVE LASER FOR EUV LIGHT SOURCE
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|
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Patent #:
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|
Issue Dt:
|
12/03/2013
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Application #:
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12927063
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Filing Dt:
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11/05/2010
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Publication #:
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Pub Dt:
|
03/31/2011
| | | | |
Title:
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EUV OPTICS
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|
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Patent #:
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|
Issue Dt:
|
07/18/2017
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Application #:
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12928313
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Filing Dt:
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12/07/2010
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Publication #:
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Pub Dt:
|
04/07/2011
| | | | |
Title:
|
LASER PRODUCED PLASMA EUV LIGHT SOURCE
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|
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Patent #:
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|
Issue Dt:
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11/27/2012
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Application #:
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12932067
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Filing Dt:
|
02/17/2011
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Publication #:
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|
Pub Dt:
|
09/29/2011
| | | | |
Title:
|
LASER PRODUCED PLASMA EUV LIGHT SOURCE HAVING A DROPLET STREAM PRODUCED USING A MODULATED DISTURBANCE WAVE
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|
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Patent #:
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|
Issue Dt:
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04/22/2014
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Application #:
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13441639
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Filing Dt:
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04/06/2012
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Publication #:
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Pub Dt:
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08/02/2012
| | | | |
Title:
|
LASER PRODUCED PLASMA EUV LIGHT SOURCE
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|
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Patent #:
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|
Issue Dt:
|
07/22/2014
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Application #:
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13493871
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Filing Dt:
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06/11/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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LASER-PRODUCED-PLASMA EUV LIGHT SOURCE
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|
|
Patent #:
|
|
Issue Dt:
|
08/15/2017
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Application #:
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13960726
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Filing Dt:
|
08/06/2013
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Publication #:
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Pub Dt:
|
12/05/2013
| | | | |
Title:
|
DRIVE LASER FOR EUV LIGHT SOURCE
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|
|
Patent #:
|
|
Issue Dt:
|
12/09/2014
|
Application #:
|
14049957
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Filing Dt:
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10/09/2013
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Publication #:
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Pub Dt:
|
06/26/2014
| | | | |
Title:
|
EUV OPTICS
|
|