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Total properties:
22
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Patent #:
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Issue Dt:
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06/13/1995
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Application #:
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08178530
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Filing Dt:
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01/05/1994
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Title:
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WAFER-HANDLING APPARATUS HAVING A RESILLENT MEMBRANE WHICH HOLDS WATER WHEN A VACUM IS APPLIED
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Patent #:
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Issue Dt:
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09/12/1995
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Application #:
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08178531
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Filing Dt:
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01/05/1994
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Title:
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WAFER CARRIER FOR FILM PLANARIZATION
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Patent #:
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Issue Dt:
|
03/12/2002
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Application #:
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09038875
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Filing Dt:
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03/11/1998
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Title:
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PARALLEL ALIGNMENT METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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09124160
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Filing Dt:
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07/27/1998
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Title:
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APPARATUS FOR SENSING THE PRESENCE OF A WAFER
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09247106
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Filing Dt:
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02/09/1999
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Title:
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ACCURATE POSITIONING OF A WAFER
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09247107
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Filing Dt:
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02/09/1999
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Title:
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NON-CONTACTING SUPPORT FOR A WAFER
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Patent #:
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Issue Dt:
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07/31/2001
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Application #:
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09247108
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Filing Dt:
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02/09/1999
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Title:
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SENSING THE PRESENCE OF A WAFER
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Patent #:
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Issue Dt:
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08/15/2000
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Application #:
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09247109
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Filing Dt:
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02/09/1999
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Title:
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LIFTING AND RINSING A WAFER
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09330472
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Filing Dt:
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06/11/1999
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Title:
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OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09386741
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Filing Dt:
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08/31/1999
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Title:
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UNSUPPORTED CHEMICAL MECHANICAL POLISHING BELT
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09514416
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Filing Dt:
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02/28/2000
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Title:
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Method and system for chemical mechanical polishing
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09596842
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Filing Dt:
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06/19/2000
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Title:
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POLISHING PAD WITH REDUCED MOISTURE ABSORPTION
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09608618
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Filing Dt:
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06/30/2000
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Title:
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LIFTING AND RINSING A WAFER
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Patent #:
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|
Issue Dt:
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06/18/2002
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Application #:
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09630507
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Filing Dt:
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08/02/2000
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Title:
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ACCURATE POSITIONING OF A WAFER
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|
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Patent #:
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|
Issue Dt:
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04/01/2003
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Application #:
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09688013
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Filing Dt:
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10/13/2000
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Title:
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INFRARED END-POINT DETECTION SYSTEM
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|
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09712825
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Filing Dt:
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11/14/2000
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Title:
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OPTICAL VIEW PORT FOR CHEMICAL MECHANICAL PLANARIZATION ENDPOINT DETECTION
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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09780067
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Filing Dt:
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02/09/2001
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|
Title:
|
SENSING THE PRESENCE OF A WAFER
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|
|
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Patent #:
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|
Issue Dt:
|
02/11/2003
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Application #:
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09828626
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Filing Dt:
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04/05/2001
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Publication #:
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Pub Dt:
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10/10/2002
| | | | |
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Title:
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COMPOSITE POLISHING PAD FOR CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10008635
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Filing Dt:
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12/04/2001
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Publication #:
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Pub Dt:
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05/09/2002
| | | | |
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Title:
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PARALLEL ALIGNMENT METHOD AND APPARATUS FOR CHEMICAL MECHANICAL POLISHING
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|
|
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Patent #:
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|
Issue Dt:
|
12/02/2003
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Application #:
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10036624
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Filing Dt:
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11/09/2001
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Publication #:
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Pub Dt:
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06/06/2002
| | | | |
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Title:
|
UNSUPPORTED CHEMICAL MECHANICAL POLISHING BELT
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|
|
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Patent #:
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|
Issue Dt:
|
10/04/2005
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Application #:
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10879654
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Filing Dt:
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06/28/2004
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Title:
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SYSTEM AND METHOD FOR IN-SITU MEASURING AND MONITORING CMP POLISHING PAD THICKNESS
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|
|
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Patent #:
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Issue Dt:
|
10/11/2005
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Application #:
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10901678
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Filing Dt:
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07/28/2004
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|
Title:
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METHODS FOR REDUCING SLURRY USAGE IN A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM
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