Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 015074/0752 | |
| Pages: | 5 |
| | Recorded: | 03/08/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
4
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09637096
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Filing Dt:
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08/10/2000
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Title:
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COMPACT LOAD LOCK SYSTEM FOR ION BEAM PROCESSING OF FOUPS
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09887808
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Filing Dt:
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06/22/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Title:
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ION IMPLANTATION UNIFORMITY CORRECTION USING BEAM CURRENT CONTROL
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10032664
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Filing Dt:
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10/19/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Title:
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SYSTEM AND METHOD FOR RAPIDLY CONTROLLING THE OUTPUT OF AN ION SOURCE FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10153114
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Filing Dt:
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05/21/2002
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Publication #:
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Pub Dt:
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09/26/2002
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Title:
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SUBSTRATE POSITIONING SYSTEM
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Assignee
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108 CHERRY HILL DRIVE |
ATTN: PATENT LAW DEPARTMENT |
BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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AXCELIS TECHNOLOGIES, INC.
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DENIS A. ROBITAILLE
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ATTN: PATENT LAW DEPARTMENT
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108 CHERRY HILL DRIVE
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BEVERLY, MA 01915
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