Patent Assignment Details
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Reel/Frame: | 030429/0753 | |
| Pages: | 27 |
| | Recorded: | 05/16/2013 | | |
Attorney Dkt #: | KLA P3928 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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13774025
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Filing Dt:
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02/22/2013
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Publication #:
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Pub Dt:
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08/28/2014
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Title:
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Systems for Providing Illumination in Optical Metrology
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
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14301 FNB PARKWAY
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SUITE 220
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OMAHA, NE 68154-5299
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