Patent Assignment Details
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| Reel/Frame: | 024834/0756 | |
| Pages: | 4 |
| | Recorded: | 08/13/2010 | | |
| Attorney Dkt #: | 10274 C01 - C05 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
5
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Patent #:
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Issue Dt:
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03/17/2015
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Application #:
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12855670
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/16/2010
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Title:
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PLASMA REACTOR WITH A MULTIPLE ZONE THERMAL CONTROL FEED FORWARD CONTROL APPARATUS
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Patent #:
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Issue Dt:
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01/10/2012
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Application #:
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12855674
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/23/2010
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Title:
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PLASMA REACTOR WITH FEED FORWARD THERMAL CONTROL SYSTEM USING A THERMAL MODEL FOR ACCOMMODATING RF POWER CHANGES OR WAFER TEMPERATURE CHANGES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12855675
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/23/2010
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Title:
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CAPACITIVLEY COUPLED PLASMA REACTOR HAVING A COOLED/HEATED WAFER SUPPORT WITH UNIFORM TEMPERATURE DISTRIBUTION
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Patent #:
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Issue Dt:
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12/25/2012
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Application #:
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12855678
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/02/2010
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Title:
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CAPACITIVELY COUPLED PLASMA REACTOR HAVING VERY AGILE WAFER TEMPERATURE CONTROL
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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12855680
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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12/02/2010
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Title:
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METHOD OF COOLING A WAFER SUPPORT AT A UNIFORM TEMPERATURE IN A CAPACITIVELY COUPLED PLASMA REACTOR
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Assignee
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| 3355 EAST LA PLAMA AVENUE |
| ANAHEIM, CALIFORNIA 92806 |
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Correspondence name and address
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ROBERT WALLACE
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LAW OFFICE OF ROBERT M. WALLACE
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2112 EASTMAN AVENUE, SUITE 102
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VENTURA, CA 93003
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