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Reel/Frame:038891/0765   Pages: 32
Recorded: 05/31/2016
Attorney Dkt #:F163386
Conveyance: SECURITY AGREEMENT
Total properties: 465
Page 4 of 5
Pages: 1 2 3 4 5
1
Patent #:
8950998
Issue Dt:
02/10/2015
Application #:
12106975
Filing Dt:
04/21/2008
Publication #:
US20080260500
Pub Dt:
10/23/2008
Title:
BATCH SUBSTRATE HANDLING
2
Patent #:
8267636
Issue Dt:
09/18/2012
Application #:
12117355
Filing Dt:
05/08/2008
Publication #:
US20080298944
Pub Dt:
12/04/2008
Title:
SUBSTRATE TRANSPORT APPARATUS
3
Patent #:
8752449
Issue Dt:
06/17/2014
Application #:
12117415
Filing Dt:
05/08/2008
Publication #:
US20090087288
Pub Dt:
04/02/2009
Title:
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
4
Patent #:
8562271
Issue Dt:
10/22/2013
Application #:
12123329
Filing Dt:
05/19/2008
Publication #:
US20090003976
Pub Dt:
01/01/2009
Title:
COMPACT SUBSTRATE TRANSPORT SYSTEM
5
Patent #:
8272825
Issue Dt:
09/25/2012
Application #:
12123365
Filing Dt:
05/19/2008
Publication #:
US20090016855
Pub Dt:
01/15/2009
Title:
LOAD LOCK FAST PUMP VENT
6
Patent #:
9105673
Issue Dt:
08/11/2015
Application #:
12123391
Filing Dt:
05/19/2008
Publication #:
US20090129897
Pub Dt:
05/21/2009
Title:
SIDE OPENING UNIFIED POD
7
Patent #:
10586722
Issue Dt:
03/10/2020
Application #:
12131024
Filing Dt:
05/30/2008
Publication #:
US20080298936
Pub Dt:
12/04/2008
Title:
VACUUM SUBSTRATE STORAGE
8
Patent #:
7737567
Issue Dt:
06/15/2010
Application #:
12143197
Filing Dt:
06/20/2008
Publication #:
US20090001616
Pub Dt:
01/01/2009
Title:
METHOD AND APPARATUS FOR WAFER MARKING
9
Patent #:
8231322
Issue Dt:
07/31/2012
Application #:
12148346
Filing Dt:
04/18/2008
Publication #:
US20080253868
Pub Dt:
10/16/2008
Title:
FAST SWAP DUAL SUBSTRATE TRANSPORT FOR LOAD LOCK
10
Patent #:
8129984
Issue Dt:
03/06/2012
Application #:
12163716
Filing Dt:
06/27/2008
Publication #:
US20090224750
Pub Dt:
09/10/2009
Title:
MULTIPLE DIMENSION POSITION SENSOR
11
Patent #:
8222892
Issue Dt:
07/17/2012
Application #:
12163802
Filing Dt:
06/27/2008
Publication #:
US20090033316
Pub Dt:
02/05/2009
Title:
SENSOR FOR SIMULTANEOUS POSITION AND GAP MEASUREMENT
12
Patent #:
7834618
Issue Dt:
11/16/2010
Application #:
12163984
Filing Dt:
06/27/2008
Publication #:
US20090015248
Pub Dt:
01/15/2009
Title:
POSITION SENSOR SYSTEM
13
Patent #:
8659205
Issue Dt:
02/25/2014
Application #:
12163993
Filing Dt:
06/27/2008
Publication #:
US20090033173
Pub Dt:
02/05/2009
Title:
MOTOR STATOR WITH LIFT CAPABILITY AND REDUCED COGGING CHARACTERISTICS
14
Patent #:
8283813
Issue Dt:
10/09/2012
Application #:
12163996
Filing Dt:
06/27/2008
Publication #:
US20090243413
Pub Dt:
10/01/2009
Title:
ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS
15
Patent #:
8822209
Issue Dt:
09/02/2014
Application #:
12171984
Filing Dt:
07/11/2008
Publication #:
US20090176301
Pub Dt:
07/09/2009
Title:
DISPOSABLE SPINNER FLASK
16
Patent #:
8008884
Issue Dt:
08/30/2011
Application #:
12175278
Filing Dt:
07/17/2008
Publication #:
US20090022571
Pub Dt:
01/22/2009
Title:
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
17
Patent #:
9970427
Issue Dt:
05/15/2018
Application #:
12177737
Filing Dt:
07/22/2008
Publication #:
US20090007574
Pub Dt:
01/08/2009
Title:
Integration of Automated Cryopump Safety Purge
18
Patent #:
8178829
Issue Dt:
05/15/2012
Application #:
12195095
Filing Dt:
08/20/2008
Publication #:
US20090095886
Pub Dt:
04/16/2009
Title:
WAFER PRESENCE DETECTOR WITH END EFFECTORS HAVING OPTICAL COUPLERS AND FIBERS
19
Patent #:
8029225
Issue Dt:
10/04/2011
Application #:
12206382
Filing Dt:
09/08/2008
Publication #:
US20090067958
Pub Dt:
03/12/2009
Title:
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
20
Patent #:
8029226
Issue Dt:
10/04/2011
Application #:
12239717
Filing Dt:
09/26/2008
Publication #:
US20090087286
Pub Dt:
04/02/2009
Title:
SEMICONDUCTOR MANUFACTURING SYSTEMS
21
Patent #:
7988399
Issue Dt:
08/02/2011
Application #:
12260818
Filing Dt:
10/29/2008
Publication #:
US20090053016
Pub Dt:
02/26/2009
Title:
MID-ENTRY LOAD LOCK FOR SEMICONDUCTOR HANDLING SYSTEM
22
Patent #:
7854898
Issue Dt:
12/21/2010
Application #:
12271762
Filing Dt:
11/14/2008
Publication #:
US20090148350
Pub Dt:
06/11/2009
Title:
MULTI-WELL PLATFORMS, CADDIES, LIDS AND COMBINATIONS THEREOF
23
Patent #:
8293066
Issue Dt:
10/23/2012
Application #:
12325993
Filing Dt:
12/01/2008
Publication #:
US20090078374
Pub Dt:
03/26/2009
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
24
Patent #:
8960099
Issue Dt:
02/24/2015
Application #:
12330780
Filing Dt:
12/09/2008
Publication #:
US20090162179
Pub Dt:
06/25/2009
Title:
SUBSTRATE PROCESSING APPARATUS
25
Patent #:
8091381
Issue Dt:
01/10/2012
Application #:
12358448
Filing Dt:
01/23/2009
Publication #:
US20090133436
Pub Dt:
05/28/2009
Title:
EFFICIENT HEAT EXCHANGER FOR REFRIGERATION PROCESS
26
Patent #:
9524896
Issue Dt:
12/20/2016
Application #:
12368241
Filing Dt:
02/09/2009
Publication #:
US20090191030
Pub Dt:
07/30/2009
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
27
Patent #:
8424703
Issue Dt:
04/23/2013
Application #:
12434330
Filing Dt:
05/01/2009
Publication #:
US20090272743
Pub Dt:
11/05/2009
Title:
SUBSTRATE CONTAINER SEALING VIA MOVABLE MAGNETS
28
Patent #:
9033647
Issue Dt:
05/19/2015
Application #:
12499565
Filing Dt:
07/08/2009
Publication #:
US20100119349
Pub Dt:
05/13/2010
Title:
SUBSTRATE ALIGNMENT SYSTEM
29
Patent #:
8602706
Issue Dt:
12/10/2013
Application #:
12542588
Filing Dt:
08/17/2009
Publication #:
US20110038692
Pub Dt:
02/17/2011
Title:
SUBSTRATE PROCESSING APPARATUS
30
Patent #:
8328495
Issue Dt:
12/11/2012
Application #:
12544064
Filing Dt:
08/19/2009
Publication #:
US20100054897
Pub Dt:
03/04/2010
Title:
REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
31
Patent #:
7975746
Issue Dt:
07/12/2011
Application #:
12637597
Filing Dt:
12/14/2009
Publication #:
US20100089537
Pub Dt:
04/15/2010
Title:
DEVICE AND METHOD FOR REMOVING A PEELABLE SEAL
32
Patent #:
8459922
Issue Dt:
06/11/2013
Application #:
12651160
Filing Dt:
12/31/2009
Publication #:
US20110118875
Pub Dt:
05/19/2011
Title:
MANIPULATOR AUO-TEACH AND POSITION CORRECTION SYSTEM
33
Patent #:
8454293
Issue Dt:
06/04/2013
Application #:
12723837
Filing Dt:
03/15/2010
Publication #:
US20100172721
Pub Dt:
07/08/2010
Title:
SUBSTRATE LOADING AND UNLOADING STATION WITH BUFFER
34
Patent #:
8425172
Issue Dt:
04/23/2013
Application #:
12761499
Filing Dt:
04/16/2010
Publication #:
US20100292826
Pub Dt:
11/18/2010
Title:
RETICLE MANIPULATION DEVICE
35
Patent #:
8851820
Issue Dt:
10/07/2014
Application #:
12780761
Filing Dt:
05/14/2010
Publication #:
US20100290872
Pub Dt:
11/18/2010
Title:
SUBSTRATE CONTAINER STORAGE SYSTEM
36
Patent #:
8882433
Issue Dt:
11/11/2014
Application #:
12780846
Filing Dt:
05/14/2010
Publication #:
US20100290873
Pub Dt:
11/18/2010
Title:
INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS
37
Patent #:
8870516
Issue Dt:
10/28/2014
Application #:
12828236
Filing Dt:
06/30/2010
Publication #:
US20120000816
Pub Dt:
01/05/2012
Title:
PORT DOOR POSITIONING APPARATUS AND ASSOCIATED METHODS
38
Patent #:
8182192
Issue Dt:
05/22/2012
Application #:
12843659
Filing Dt:
07/26/2010
Publication #:
US20110014016
Pub Dt:
01/20/2011
Title:
EQUIPMENT STORAGE FOR SUBSTRATE PROCESSING APPARATUS
39
Patent #:
8874274
Issue Dt:
10/28/2014
Application #:
12864142
Filing Dt:
10/14/2010
Publication #:
US20110016891
Pub Dt:
01/27/2011
Title:
Cryopump Network
40
Patent #:
8419341
Issue Dt:
04/16/2013
Application #:
12875414
Filing Dt:
09/03/2010
Publication #:
US20100329827
Pub Dt:
12/30/2010
Title:
LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM
41
Patent #:
8270702
Issue Dt:
09/18/2012
Application #:
12875462
Filing Dt:
09/03/2010
Publication #:
US20100324732
Pub Dt:
12/23/2010
Title:
WAFER CENTER FINDING WITH A KALMAN FILTER
42
Patent #:
NONE
Issue Dt:
Application #:
12886301
Filing Dt:
09/20/2010
Publication #:
US20110008136
Pub Dt:
01/13/2011
Title:
REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM
43
Patent #:
8678734
Issue Dt:
03/25/2014
Application #:
12897440
Filing Dt:
10/04/2010
Publication #:
US20110142575
Pub Dt:
06/16/2011
Title:
ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEM
44
Patent #:
11002566
Issue Dt:
05/11/2021
Application #:
12901146
Filing Dt:
10/08/2010
Publication #:
US20110025310
Pub Dt:
02/03/2011
Title:
POSITION FEEDBACK FOR SELF BEARING MOTOR
45
Patent #:
8439414
Issue Dt:
05/14/2013
Application #:
12908780
Filing Dt:
10/20/2010
Publication #:
US20110089709
Pub Dt:
04/21/2011
Title:
GRIPPER APPARATUS AND METHOD FOR CONTAINERS OF DIFFERENT SIZES
46
Patent #:
9567988
Issue Dt:
02/14/2017
Application #:
12936129
Filing Dt:
01/24/2011
Publication #:
US20110126553
Pub Dt:
06/02/2011
Title:
CRYOGENIC PUMP EMPLOYING TIN-GALLIUM ALLOYS AND METHODS OF USE
47
Patent #:
9297728
Issue Dt:
03/29/2016
Application #:
12941009
Filing Dt:
11/05/2010
Publication #:
US20110121001
Pub Dt:
05/26/2011
Title:
Storage Unit and Transfer System for Biological Samples
48
Patent #:
8851817
Issue Dt:
10/07/2014
Application #:
12943198
Filing Dt:
11/10/2010
Publication #:
US20120213614
Pub Dt:
08/23/2012
Title:
UNIVERSAL MODULAR WAFER TRANSPORT SYSTEM
49
Patent #:
8413452
Issue Dt:
04/09/2013
Application #:
12950080
Filing Dt:
11/19/2010
Publication #:
US20110126554
Pub Dt:
06/02/2011
Title:
LINEAR DRIVE CRYOGENIC REFRIGERATOR
50
Patent #:
8125652
Issue Dt:
02/28/2012
Application #:
12977514
Filing Dt:
12/23/2010
Publication #:
US20110093237
Pub Dt:
04/21/2011
Title:
WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES
51
Patent #:
8356207
Issue Dt:
01/15/2013
Application #:
13008559
Filing Dt:
01/18/2011
Publication #:
US20110173496
Pub Dt:
07/14/2011
Title:
INTELLIGENT CONDITION MONITORING AND FAULT DIAGNOSTIC SYSTEM FOR PREVENTATIVE MAINTENANCE
52
Patent #:
9020617
Issue Dt:
04/28/2015
Application #:
13011970
Filing Dt:
01/24/2011
Publication #:
US20110118855
Pub Dt:
05/19/2011
Title:
SCALABLE MOTION CONTROL SYSTEM
53
Patent #:
8951002
Issue Dt:
02/10/2015
Application #:
13030856
Filing Dt:
02/18/2011
Publication #:
US20120045308
Pub Dt:
02/23/2012
Title:
DUAL ARM ROBOT
54
Patent #:
8403619
Issue Dt:
03/26/2013
Application #:
13030926
Filing Dt:
02/18/2011
Publication #:
US20120045300
Pub Dt:
02/23/2012
Title:
HIGH SPEED SUBSTRATE ALIGNER APPARATUS
55
Patent #:
8801069
Issue Dt:
08/12/2014
Application #:
13036876
Filing Dt:
02/28/2011
Publication #:
US20110241367
Pub Dt:
10/06/2011
Title:
ROBOT EDGE CONTACT GRIPPER
56
Patent #:
8303764
Issue Dt:
11/06/2012
Application #:
13042407
Filing Dt:
03/07/2011
Publication #:
US20110158773
Pub Dt:
06/30/2011
Title:
APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES
57
Patent #:
NONE
Issue Dt:
Application #:
13061083
Filing Dt:
05/16/2011
Publication #:
US20110308335
Pub Dt:
12/22/2011
Title:
Sample Tube with Identification
58
Patent #:
10156386
Issue Dt:
12/18/2018
Application #:
13106180
Filing Dt:
05/12/2011
Publication #:
US20120038120
Pub Dt:
02/16/2012
Title:
SYSTEM AND METHOD FOR CRYOGENIC COOLING
59
Patent #:
NONE
Issue Dt:
Application #:
13111149
Filing Dt:
05/19/2011
Publication #:
US20110265496
Pub Dt:
11/03/2011
Title:
PROCESS CHAMBER WITH INTEGRATED PUMPING
60
Patent #:
8651796
Issue Dt:
02/18/2014
Application #:
13113476
Filing Dt:
05/23/2011
Publication #:
US20110224822
Pub Dt:
09/15/2011
Title:
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE INDEPENDENTLY MOVABLE ARTICULATED ARMS
61
Patent #:
8636459
Issue Dt:
01/28/2014
Application #:
13151178
Filing Dt:
06/01/2011
Publication #:
US20120003067
Pub Dt:
01/05/2012
Title:
Automated Storage System for High Density Storage
62
Patent #:
8807905
Issue Dt:
08/19/2014
Application #:
13158883
Filing Dt:
06/13/2011
Publication #:
US20120148374
Pub Dt:
06/14/2012
Title:
LINEAR SEMICONDUCTOR PROCESSING FACILITIES
63
Patent #:
8651789
Issue Dt:
02/18/2014
Application #:
13159034
Filing Dt:
06/13/2011
Publication #:
US20110232844
Pub Dt:
09/29/2011
Title:
SUBSTRATE PROCESSING APPARATUS
64
Patent #:
8371792
Issue Dt:
02/12/2013
Application #:
13195401
Filing Dt:
08/01/2011
Publication #:
US20110280693
Pub Dt:
11/17/2011
Title:
SUBSTRATE PROCESSING APPARATUS
65
Patent #:
8237391
Issue Dt:
08/07/2012
Application #:
13219267
Filing Dt:
08/26/2011
Publication #:
US20110316370
Pub Dt:
12/29/2011
Title:
SUBSTRATE PROCESSING APPARATUS WITH MOTORS INTEGRAL TO CHAMBER WALLS
66
Patent #:
8590956
Issue Dt:
11/26/2013
Application #:
13230280
Filing Dt:
09/12/2011
Publication #:
US20120089251
Pub Dt:
04/12/2012
Title:
SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATION
67
Patent #:
8523507
Issue Dt:
09/03/2013
Application #:
13248386
Filing Dt:
09/29/2011
Publication #:
US20120020759
Pub Dt:
01/26/2012
Title:
SEMICONDUCTOR MANUFACTURING SYSTEMS
68
Patent #:
8944738
Issue Dt:
02/03/2015
Application #:
13248600
Filing Dt:
09/29/2011
Publication #:
US20120014769
Pub Dt:
01/19/2012
Title:
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
69
Patent #:
9656386
Issue Dt:
05/23/2017
Application #:
13270844
Filing Dt:
10/11/2011
Publication #:
US20120128450
Pub Dt:
05/24/2012
Title:
COAXIAL DRIVE VACUUM ROBOT
70
Patent #:
8764934
Issue Dt:
07/01/2014
Application #:
13284437
Filing Dt:
10/28/2011
Publication #:
US20120103501
Pub Dt:
05/03/2012
Title:
DEVICE AND METHOD FOR REMOVING A PEELABLE SEAL
71
Patent #:
9691649
Issue Dt:
06/27/2017
Application #:
13286186
Filing Dt:
10/31/2011
Publication #:
US20120076626
Pub Dt:
03/29/2012
Title:
LINEAR VACUUM ROBOT WITH Z MOTION AND ARTICULATED ARM
72
Patent #:
9623555
Issue Dt:
04/18/2017
Application #:
13293717
Filing Dt:
11/10/2011
Publication #:
US20120141235
Pub Dt:
06/07/2012
Title:
DUAL ARM ROBOT
73
Patent #:
9324594
Issue Dt:
04/26/2016
Application #:
13334181
Filing Dt:
12/22/2011
Publication #:
US20120195717
Pub Dt:
08/02/2012
Title:
WORKPIECE HANDLING MODULES
74
Patent #:
10168344
Issue Dt:
01/01/2019
Application #:
13334619
Filing Dt:
12/22/2011
Publication #:
US20120163945
Pub Dt:
06/28/2012
Title:
DRIVE ASSEMBLY FOR ROBOTIC CONVEYOR SYSTEM
75
Patent #:
8800774
Issue Dt:
08/12/2014
Application #:
13337028
Filing Dt:
12/23/2011
Publication #:
US20120125808
Pub Dt:
05/24/2012
Title:
WORKPIECE SUPPORT STRUCTURES AND APPARATUS FOR ACCESSING SAME
76
Patent #:
8509938
Issue Dt:
08/13/2013
Application #:
13366968
Filing Dt:
02/06/2012
Publication #:
US20120136471
Pub Dt:
05/31/2012
Title:
SUBSTRATE APPARATUS CALIBRATION AND SYNCHRONIZATION PROCEDURE
77
Patent #:
8253948
Issue Dt:
08/28/2012
Application #:
13406252
Filing Dt:
02/27/2012
Publication #:
US20120154822
Pub Dt:
06/21/2012
Title:
WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES
78
Patent #:
8803513
Issue Dt:
08/12/2014
Application #:
13412392
Filing Dt:
03/05/2012
Publication #:
US20120223597
Pub Dt:
09/06/2012
Title:
MULTIPLE DIMENSION POSITION SENSOR
79
Patent #:
8918203
Issue Dt:
12/23/2014
Application #:
13417837
Filing Dt:
03/12/2012
Publication #:
US20120232690
Pub Dt:
09/13/2012
Title:
SUBSTRATE PROCESSING APPARATUS
80
Patent #:
8628288
Issue Dt:
01/14/2014
Application #:
13436155
Filing Dt:
03/30/2012
Publication #:
US20120189406
Pub Dt:
07/26/2012
Title:
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Assignors
1
BROOKS AUTOMATION, INC.
Exec Dt:
05/26/2016
2
BIOSTORAGE TECHNOLOGIES
Exec Dt:
05/26/2016
Assignee
1
WELLS FARGO BANK, NATIONAL ASSOCIATION
ONE BOSTON PLACE, 18TH FLOOR
BOSTON, MASSACHUSETTS 02108
Correspondence name and address
DARLENA BARI STARK
1025 VERMONT AVE NW, SUITE 1130
NATIONAL CORPORATE RESEARCH, LTD.
WASHINGTON, DC 20005

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