Patent Assignment Details
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| Reel/Frame: | 008786/0766 | |
| Pages: | 4 |
| | Recorded: | 09/04/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/1999
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Application #:
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08923453
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Filing Dt:
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09/04/1997
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Title:
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HETERODYNE SCATTEROMETER FOR DETECTING AND ANALYZING WAFER SURFACE DEFECTS
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Assignee
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| SUITE 205 |
| 2000 OAKLEY PARK ROAD |
| WALLED LAKE, MICHIGAN 48390 |
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Correspondence name and address
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DYKEMA GOSSETT PLLC
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KEVIN G. MIERZWA
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1577 N. WOODWARD
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SUITE 300
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BLOOMFIELD HILLS, MI 48304
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