Patent Assignment Details
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| Reel/Frame: | 027191/0767 | |
| Pages: | 5 |
| | Recorded: | 11/08/2011 | | |
| Attorney Dkt #: | APPM/016292 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13222088
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Filing Dt:
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08/31/2011
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Publication #:
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Pub Dt:
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02/28/2013
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Title:
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METHODS FOR IN-SITU CHAMBER DRY CLEAN IN PHOTOMASK PLASMA ETCHING PROCESSING CHAMBER
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PATTERSON & SHERIDAN, LLP - - APPM/TX
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3040 POST OAK BOULEVARD, SUITE 1500
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HOUSTON, TX 77056
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