|
Total properties:
14
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/2013
|
Application #:
|
13089830
|
Filing Dt:
|
04/19/2011
|
|
Publication #:
|
|
Pub Dt:
|
10/25/2012
| | | | |
|
Title:
|
VACUUM SYSTEM COLD TRAP FILTER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/13/2015
|
Application #:
|
13102206
|
Filing Dt:
|
05/06/2011
|
|
Publication #:
|
|
Pub Dt:
|
11/08/2012
| | | | |
|
Title:
|
RF Coupled Plasma Abatement System Comprising an Integrated Power Oscillator
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13116580
|
Filing Dt:
|
05/26/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/01/2011
| | | | |
|
Title:
|
ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION ON WORKPIECES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
13116661
|
Filing Dt:
|
05/26/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/01/2011
| | | | |
|
Title:
|
HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/2015
|
Application #:
|
13116732
|
Filing Dt:
|
05/26/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/01/2011
| | | | |
|
Title:
|
MATCHED COEFFICIENT OF THERMAL EXPANSION FOR AN ELECTROSTATIC CHUCK
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13117488
|
Filing Dt:
|
05/27/2011
|
|
Publication #:
|
|
Pub Dt:
|
09/22/2011
| | | | |
|
Title:
|
PLASMA MEDIATED ASHING PROCESSES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/2013
|
Application #:
|
13150822
|
Filing Dt:
|
06/01/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/08/2011
| | | | |
|
Title:
|
EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2015
|
Application #:
|
13152735
|
Filing Dt:
|
06/03/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/08/2011
| | | | |
|
Title:
|
HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT HIGH TEMPERATURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/05/2014
|
Application #:
|
13154836
|
Filing Dt:
|
06/07/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/08/2011
| | | | |
|
Title:
|
HEATED ANNULUS CHUCK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2012
|
Application #:
|
13216812
|
Filing Dt:
|
08/24/2011
|
|
Title:
|
UNIFORMITY OF A SCANNED ION BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
13308795
|
Filing Dt:
|
12/01/2011
|
|
Publication #:
|
|
Pub Dt:
|
06/06/2013
| | | | |
|
Title:
|
Automatic Control System for Selection and Optimization of Co-Gas Flow Levels
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/28/2014
|
Application #:
|
13324050
|
Filing Dt:
|
12/13/2011
|
|
Publication #:
|
|
Pub Dt:
|
06/13/2013
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR ION IMPLANTATION WITH IMPROVED PRODUCTIVITY AND UNIFORMITY
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13335889
|
Filing Dt:
|
12/22/2011
|
|
Publication #:
|
|
Pub Dt:
|
06/27/2013
| | | | |
|
Title:
|
PLASMA GENERATING APPARATUS AND PROCESS FOR SIMULTANEOUS EXPOSURE OF A WORKPIECE TO ELECTROMAGNETIC RADIATION AND PLASMA
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/24/2015
|
Application #:
|
13348855
|
Filing Dt:
|
01/12/2012
|
|
Publication #:
|
|
Pub Dt:
|
07/18/2013
| | | | |
|
Title:
|
BEAM LINE DESIGN TO REDUCE ENERGY CONTAMINATION
|
|
