Patent Assignment Details
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Reel/Frame: | 015007/0769 | |
| Pages: | 5 |
| | Recorded: | 08/11/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10864963
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Filing Dt:
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06/10/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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Method and system for analyzing and tracking defects among a plurality of substrates such as silicon wafers
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Assignee
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80 WILSON WAY |
WESTWOOD, MASSACHUSETTS 02090 |
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Correspondence name and address
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ALSTON & BIRD LLP
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DONALD M. HILL, JR.
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BANK OF AMERICA PLAZA
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101 SOUTH TRYON STREET, SUITE 4000
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CHARLOTTE, NC 28280-4000
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