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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	013645/0778			Pages:	5
		Recorded:	01/13/2003
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 16

Patent #:	5830272	Issue Dt:	11/03/1998	Application #:	08554459	Filing Dt:	11/07/1995
Title:	SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	6117238	Issue Dt:	09/12/2000	Application #:	08714804	Filing Dt:	09/17/1996
Title:	END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER

Patent #:	5865969	Issue Dt:	02/02/1999	Application #:	08736232	Filing Dt:	10/23/1996
Title:	APPARATUS FOR, AND METHOD OF, PROVIDING A DEPOSITION ON A SUBSTRATE

Patent #:	6176987	Issue Dt:	01/23/2001	Application #:	08788408	Filing Dt:	01/27/1997
Title:	SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION OF WAFERS

Patent #:	5881668	Issue Dt:	03/16/1999	Application #:	08790732	Filing Dt:	01/27/1997
Title:	SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	5858101	Issue Dt:	01/12/1999	Application #:	08790735	Filing Dt:	01/27/1997
Title:	SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION OF WAFERS

Patent #:	5879460	Issue Dt:	03/09/1999	Application #:	08790736	Filing Dt:	01/27/1997
Title:	SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	5759268	Issue Dt:	06/02/1998	Application #:	08791449	Filing Dt:	01/27/1997
Title:	SYSTEM FOR OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	5882403	Issue Dt:	03/16/1999	Application #:	08791502	Filing Dt:	01/27/1997
Title:	SYSTEM FOR PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	6083357	Issue Dt:	07/04/2000	Application #:	08791503	Filing Dt:	01/27/1997
Title:	SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Patent #:	6149367	Issue Dt:	11/21/2000	Application #:	08999936	Filing Dt:	04/15/1998
Title:	END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER

Patent #:	6059517	Issue Dt:	05/09/2000	Application #:	08999937	Filing Dt:	04/15/1998
Title:	END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER

Patent #:	6135051	Issue Dt:	10/24/2000	Application #:	08999939	Filing Dt:	04/15/1998
Title:	END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER

Patent #:	6051066	Issue Dt:	04/18/2000	Application #:	09059883	Filing Dt:	04/14/1998
Title:	END EFFECTOR ASSEMBLY FOR INCLUSION IN A SYSTEM FOR PRODUCING UNIFORM DEPOSITS ON A WAFER

Patent #:	6159290	Issue Dt:	12/12/2000	Application #:	09165689	Filing Dt:	10/02/1998
Title:	APPARATUS FOR, AND METHOD OF, PROVIDING CONTROLLED DEPOSITIONS ON SUBSTRATES

Patent #:	6235172	Issue Dt:	05/22/2001	Application #:	09387370	Filing Dt:	08/31/1999
Title:	SYSTEM FOR AND METHOD OF PROVIDING A CONTROLLED DEPOSITION ON WAFERS

Assignor

Exec Dt:

12/16/2002

Assignee

90 INDUSTRIAL WAY

WILMINGTON, MASSACHUSETTS 01887-4610

Correspondence name and address
	TESTA, HURWITZ & THIBEAULT LLP
	PATENT ADMINISTRATOR
	HIGH STREET TOWER
	125 HIGH STREET
	BOSTON, MA 02110

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