Patent Assignment Details
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Reel/Frame: | 010895/0780 | |
| Pages: | 2 |
| | Recorded: | 06/22/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09599383
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Filing Dt:
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06/22/2000
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Title:
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ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE COMPENSATING FOR LINE WIDTH VARIANCES IN A PHOTOLITHOGRAPHIC SYSTEM
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Assignee
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77 DANBURY ROAD |
WILTON, CONNECTICUT 06897 |
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Correspondence name and address
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FATTIBENE AND FATTIBENE
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PAUL A. FATTIBENE
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2480 POST ROAD
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SOUTHPORT, CT 06490
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