Patent Assignment Details
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| Reel/Frame: | 017898/0782 | |
| Pages: | 4 |
| | Recorded: | 05/11/2006 | | |
| Attorney Dkt #: | 514312000400 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/08/2010
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Application #:
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10579423
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Filing Dt:
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05/11/2006
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Publication #:
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Pub Dt:
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04/05/2007
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Title:
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SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND COMPUTER-READABLE MEMORY MEDIUM
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Assignee
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| 3-6, AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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DAVID L. FEHRMAN
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MORRISON & FOERSTER LLP
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555 WEST FIFTH STREET
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LOS ANGELES, CA 90013-1024
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