Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 036120/0782 | |
| Pages: | 14 |
| | Recorded: | 07/17/2015 | | |
| Attorney Dkt #: | KLA-P2110US/1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/25/2015
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Application #:
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13336370
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Filing Dt:
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12/23/2011
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Publication #:
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Pub Dt:
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04/19/2012
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Title:
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FEEDFORWARD/FEEDBACK LITHO PROCESS CONTROL OF STRESS AND OVERLAY
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Assignee
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| 1 TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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JOSHUA D. ISENBERG
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809 CORPORATE WAY
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FREMONT, CA 94539
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