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Reel/Frame:018383/0784   Pages: 3
Recorded: 10/04/2006
Attorney Dkt #:05609.0086-00
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11542195
Filing Dt:
10/04/2006
Publication #:
Pub Dt:
02/08/2007
Title:
Exposure apparatus control method, exposure method and apparatus using the control method, and device manufacturing method
Assignor
1
Exec Dt:
09/29/2006
Assignee
1
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO, JAPAN 100-8331
Correspondence name and address
MICHAEL R. KELLY
FINNEGAN, HENDERSON, FARABOW ET AL.
901 NEW YORK AVENUE, N.W.
WASHINGTON, D.C. 20001-4413

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