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Reel/Frame:051882/0786   Pages: 15
Recorded: 02/20/2020
Attorney Dkt #:334408-106
Conveyance: SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 25
1
Patent #:
6119710
Issue Dt:
09/19/2000
Application #:
09318880
Filing Dt:
05/26/1999
Title:
METHOD FOR WIDE RANGE GAS FLOW WITH REAL TIME FLOW MEASUREMENT AND CORRECTION
2
Patent #:
6216726
Issue Dt:
04/17/2001
Application #:
09641882
Filing Dt:
08/17/2000
Title:
Wide range gas flow system with real time flow measurement and correction
3
Patent #:
7871830
Issue Dt:
01/18/2011
Application #:
11335099
Filing Dt:
01/18/2006
Publication #:
US20060157446
Pub Dt:
07/20/2006
Title:
END POINT DETECTION METHOD FOR PLASMA ETCHING OF SEMICONDUCTOR WAFERS WITH LOW EXPOSED AREA
4
Patent #:
7695984
Issue Dt:
04/13/2010
Application #:
11409308
Filing Dt:
04/20/2006
Title:
USE OF MODELED PARAMETERS FOR REAL-TIME SEMICONDUCTOR PROCESS METROLOGY APPLIED TO SEMICONDUCTOR PROCESSES
5
Patent #:
8102844
Issue Dt:
01/24/2012
Application #:
11525539
Filing Dt:
09/21/2006
Title:
HIGH-SPEED SECS MESSAGE SERVICES (HSMS) PASS-THROUGH INCLUDING BYPASS
6
Patent #:
7873052
Issue Dt:
01/18/2011
Application #:
11787654
Filing Dt:
04/16/2007
Publication #:
US20080253377
Pub Dt:
10/16/2008
Title:
SYSTEM AND METHOD FOR CONTROLLING PROCESS END-POINT UTILIZING LEGACY END-POINT SYSTEM
7
Patent #:
7937232
Issue Dt:
05/03/2011
Application #:
11821810
Filing Dt:
06/25/2007
Title:
DATA TIMESTAMP MANAGEMENT
8
Patent #:
7757541
Issue Dt:
07/20/2010
Application #:
11855052
Filing Dt:
09/13/2007
Title:
TECHNIQUES FOR CALIBRATION OF GAS FLOWS
9
Patent #:
7590498
Issue Dt:
09/15/2009
Application #:
11948907
Filing Dt:
11/30/2007
Title:
SYSTEM AND METHOD FOR VACUUM CHAMBER LEAK DETECTION
10
Patent #:
7940395
Issue Dt:
05/10/2011
Application #:
12184574
Filing Dt:
08/01/2008
Publication #:
US20090180113
Pub Dt:
07/16/2009
Title:
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
11
Patent #:
7823436
Issue Dt:
11/02/2010
Application #:
12354723
Filing Dt:
01/15/2009
Publication #:
US20090183548
Pub Dt:
07/23/2009
Title:
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
12
Patent #:
8240324
Issue Dt:
08/14/2012
Application #:
12355654
Filing Dt:
01/16/2009
Publication #:
US20090183549
Pub Dt:
07/23/2009
Title:
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
13
Patent #:
8393197
Issue Dt:
03/12/2013
Application #:
12509375
Filing Dt:
07/24/2009
Publication #:
US20100018293
Pub Dt:
01/28/2010
Title:
METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN THE PRESENCE OF CHAMBER OUTGASSING
14
Patent #:
8271210
Issue Dt:
09/18/2012
Application #:
12634568
Filing Dt:
12/09/2009
Publication #:
US20110137581
Pub Dt:
06/09/2011
Title:
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
15
Patent #:
8271211
Issue Dt:
09/18/2012
Application #:
12634593
Filing Dt:
12/09/2009
Publication #:
US20110137582
Pub Dt:
06/09/2011
Title:
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
16
Patent #:
8265888
Issue Dt:
09/11/2012
Application #:
12634629
Filing Dt:
12/09/2009
Publication #:
US20110137583
Pub Dt:
06/09/2011
Title:
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PERFORMANCE
17
Patent #:
8667830
Issue Dt:
03/11/2014
Application #:
12891714
Filing Dt:
09/27/2010
Publication #:
US20110011183
Pub Dt:
01/20/2011
Title:
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
18
Patent #:
8237928
Issue Dt:
08/07/2012
Application #:
13076409
Filing Dt:
03/30/2011
Publication #:
US20110177625
Pub Dt:
07/21/2011
Title:
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
19
Patent #:
9400004
Issue Dt:
07/26/2016
Application #:
13306940
Filing Dt:
11/29/2011
Publication #:
US20120132291
Pub Dt:
05/31/2012
Title:
TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS
20
Patent #:
8857456
Issue Dt:
10/14/2014
Application #:
13584736
Filing Dt:
08/13/2012
Publication #:
US20120304781
Pub Dt:
12/06/2012
Title:
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
21
Patent #:
9904297
Issue Dt:
02/27/2018
Application #:
14475472
Filing Dt:
09/02/2014
Publication #:
US20140366952
Pub Dt:
12/18/2014
Title:
METHOD AND APPARATUS FOR GAS FLOW CONTROL
22
Patent #:
9523435
Issue Dt:
12/20/2016
Application #:
14475494
Filing Dt:
09/02/2014
Publication #:
US20140367596
Pub Dt:
12/18/2014
Title:
METHOD AND APPARATUS FOR GAS FLOW CONTROL
23
Patent #:
10401202
Issue Dt:
09/03/2019
Application #:
15206180
Filing Dt:
07/08/2016
Publication #:
US20170010625
Pub Dt:
01/12/2017
Title:
METHOD AND APPARATUS FOR GAS FLOW CONTROL
24
Patent #:
9983595
Issue Dt:
05/29/2018
Application #:
15342067
Filing Dt:
11/02/2016
Publication #:
US20170052546
Pub Dt:
02/23/2017
Title:
METHOD AND APPARATUS FOR GAS FLOW CONTROL
25
Patent #:
11079035
Issue Dt:
08/03/2021
Application #:
16510671
Filing Dt:
07/12/2019
Publication #:
US20210010608
Pub Dt:
01/14/2021
Title:
PRELOADED PIEZO ACTUATOR AND GAS VALVE EMPLOYING THE ACTUATOR
Assignor
1
PIVOTAL SYSTEMS CORPORATION
Exec Dt:
02/20/2020
Assignee
1
ANZU INDUSTRIAL RBI USA LLC
12610 RACE TRACK RD
SUITE 250
TAMPA, FLORIDA 33626
Correspondence name and address
DEREK MONTEBLANCO
C/O COOLEY LLP
4401 EASTGATE MALL
SAN DIEGO, CA 92121

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