Patent Assignment Details
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Reel/Frame: | 019793/0787 | |
| Pages: | 2 |
| | Recorded: | 08/24/2007 | | |
Attorney Dkt #: | WIP-0009 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11892628
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Filing Dt:
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08/24/2007
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Publication #:
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Pub Dt:
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03/06/2008
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Title:
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Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the same
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Assignee
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333-5 SANGDAEWOON-DONG, JOONG-GU |
SEONGNAM-SI 462-807 |
GYEONGKI-DO, KOREA, REPUBLIC OF 462-807 |
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Correspondence name and address
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KED & ASSOCIATES, LLP
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P.O. BOX 221200
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CHANTILLY, VA 20153-1200
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