Patent Assignment Details
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Reel/Frame: | 024040/0795 | |
| Pages: | 5 |
| | Recorded: | 03/08/2010 | | |
Attorney Dkt #: | 03147.0001.000000 |
Conveyance: | SECURITY AGREEMENT |
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Total properties:
5
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Patent #:
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Issue Dt:
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04/08/2014
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Application #:
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12708545
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Filing Dt:
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02/19/2010
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Publication #:
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Pub Dt:
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10/28/2010
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Title:
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CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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05/07/2013
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Application #:
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12709640
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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09/23/2010
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Title:
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PREPARATION UNIT FOR LITHOGRAPHY MACHINE
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Patent #:
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Issue Dt:
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02/05/2013
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Application #:
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12709643
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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10/28/2010
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Title:
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METHOD AND ARRANGEMENT FOR REALIZING A VACUUM IN A VACUUM CHAMBER
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Patent #:
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Issue Dt:
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03/31/2015
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Application #:
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12709645
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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09/23/2010
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Title:
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Substrate Support Structure, Clamp Preparation Unit, and Lithography System
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12709647
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Filing Dt:
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02/22/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Title:
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Lithography Machine and Substrate Handling Arrangement
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Assignee
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AMSTELPLEIN 1 |
REMBRANDTTOREN - 31ST FLOOR |
AMSTERDAM, NETHERLANDS 1096 HA |
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Correspondence name and address
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HOWREY LLP
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2941 FAIRVIEW PARK DRIVE
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SUITE 200
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FALLS CHURCH, VA 22042
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