Patent Assignment Details
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| Reel/Frame: | 011203/0797 | |
| Pages: | 3 |
| | Recorded: | 10/13/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09583963
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Filing Dt:
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05/31/2000
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Title:
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Method of reducing RIE lag for deep trench silicon etching
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Assignee
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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INTERNATIONAL BUSINESS MACHINES CORP.
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H. DANIEL SCHNURMANN
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INTELLECTUAL PROPERTY LAW DEPARTMENT
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DEPT. 18G/BLDG. 300-482 - 2070 ROUTE 52
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HOPEWELL JUNCTION, NY 12533
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