Patent Assignment Details
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Reel/Frame: | 008524/0798 | |
| Pages: | 2 |
| | Recorded: | 04/11/1997 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/26/1999
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Application #:
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08840237
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Filing Dt:
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04/11/1997
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Title:
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DRY ETCHER APPARATUS AND METHOD OF PREVENTING RESIDUAL REACTION GAS FROM CONDENSING ON WAFERS AFTER ETCHING
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Assignee
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416, MAETAN-DONG, PALDAL-GU, SUWON-CITY |
KYUNGKI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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JONES & VOLENTINE, L.L.P.
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RAYMOND C. JONES, ESQ.
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11921 FREEDOM DRIVE, SUITE 550
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RESTON, VA 20190
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