Patent Assignment Details
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| Reel/Frame: | 009240/0798 | |
| Pages: | 6 |
| | Recorded: | 06/01/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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08988288
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Filing Dt:
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12/10/1997
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Title:
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METHOD AND APPARATUS FOR ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
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Assignee
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| 101 METRO DRIVE, SUITE 400 |
| SAN JOSE, CALIFORNIA 95110 |
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Correspondence name and address
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ENTERPRISE LAW GROUP, INC.
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WILLIAM B. WALKER
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4400 BOHANNON DRIVE
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SUITE 280
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MENLO PARK, CA 94025
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