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Reel/Frame:	041264/0801			Pages:	9
		Recorded:	02/15/2017
Attorney Dkt #:	037343-247
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 30

Patent #:	7303934	Issue Dt:	12/04/2007	Application #:	10531934	Filing Dt:	04/19/2005
Publication #:	US20060040505	Pub Dt:	02/23/2006
Title:	METHOD FOR MANUFACTURING A MICRO-ELECTROMECHANICAL DEVICE AND MICRO-ELECTROMECHANICAL DEVICE OBTAINED THEREWITH

Patent #:	7709285	Issue Dt:	05/04/2010	Application #:	10578026	Filing Dt:	03/13/2007
Publication #:	US20070222007	Pub Dt:	09/27/2007
Title:	METHOD OF MANUFACTURING A MEMS DEVICE AND MEMS DEVICE

Patent #:	8367215	Issue Dt:	02/05/2013	Application #:	10578027	Filing Dt:	11/06/2008
Publication #:	US20100255322	Pub Dt:	10/07/2010
Title:	RADIO-FREQUENCY MICROELECTROMECHANICAL SYSTEMS AND METHOD OF MANUFACTURING SUCH SYSTEMS

Patent #:	8098120	Issue Dt:	01/17/2012	Application #:	11718130	Filing Dt:	11/12/2007
Publication #:	US20080135385	Pub Dt:	06/12/2008
Title:	SPRING STRUCTURE FOR MEMS DEVICE

Patent #:	8203402	Issue Dt:	06/19/2012	Application #:	11718137	Filing Dt:	05/04/2009
Publication #:	US20090211885	Pub Dt:	08/27/2009
Title:	ELECTRONIC DEVICE

Patent #:	8184845	Issue Dt:	05/22/2012	Application #:	11816964	Filing Dt:	01/08/2008
Publication #:	US20080247585	Pub Dt:	10/09/2008
Title:	ELECTRICAL MODULE WITH A MEMS MICROPHONE

Patent #:	8582788	Issue Dt:	11/12/2013	Application #:	11816969	Filing Dt:	05/22/2008
Publication #:	US20080267431	Pub Dt:	10/30/2008
Title:	MEMS MICROPHONE

Patent #:	8027143	Issue Dt:	09/27/2011	Application #:	12090004	Filing Dt:	04/11/2008
Publication #:	US20080253057	Pub Dt:	10/16/2008
Title:	MEMS TUNABLE DEVICE

Patent #:	8229139	Issue Dt:	07/24/2012	Application #:	12092423	Filing Dt:	05/02/2008
Publication #:	US20080279407	Pub Dt:	11/13/2008
Title:	MEMS MICROPHONE, PRODUCTION METHOD AND METHOD FOR INSTALLING

Patent #:	8169041	Issue Dt:	05/01/2012	Application #:	12092439	Filing Dt:	08/25/2008
Publication #:	US20090001553	Pub Dt:	01/01/2009
Title:	MEMS PACKAGE AND METHOD FOR THE PRODUCTION THEREOF

Patent #:	8218794	Issue Dt:	07/10/2012	Application #:	12409328	Filing Dt:	03/23/2009
Publication #:	US20090232336	Pub Dt:	09/17/2009
Title:	COMPONENT COMPRISING A MEMS MICROPHONE AND METHOD FOR THE PRODUCTION OF SAID COMPONENT

Patent #:	8553920	Issue Dt:	10/08/2013	Application #:	12605920	Filing Dt:	10/26/2009
Publication #:	US20100272302	Pub Dt:	10/28/2010
Title:	ARRANGEMENT COMPRISING A MICROPHONE

Patent #:	8674464	Issue Dt:	03/18/2014	Application #:	12842677	Filing Dt:	07/23/2010
Publication #:	US20110018076	Pub Dt:	01/27/2011
Title:	MEMS Component, Method for Producing a MEMS Component, and Method for Handling a MEMS Component

Patent #:	8580613	Issue Dt:	11/12/2013	Application #:	12999421	Filing Dt:	05/23/2011
Publication #:	US20110233690	Pub Dt:	09/29/2011
Title:	SEMICONDUCTOR CHIP ARRANGEMENT WITH SENSOR CHIP AND MANUFACTURING METHOD

Patent #:	9051174	Issue Dt:	06/09/2015	Application #:	13003148	Filing Dt:	04/08/2011
Publication #:	US20110180885	Pub Dt:	07/28/2011
Title:	METHOD FOR ENCAPSULATING AN MEMS COMPONENT

Patent #:	8611566	Issue Dt:	12/17/2013	Application #:	13037503	Filing Dt:	03/01/2011
Publication #:	US20120224726	Pub Dt:	09/06/2012
Title:	MEMS-MICROPHONE

Patent #:	9181087	Issue Dt:	11/10/2015	Application #:	13038459	Filing Dt:	03/02/2011
Publication #:	US20120225259	Pub Dt:	09/06/2012
Title:	FLAT BACK PLATE

Patent #:	8531018	Issue Dt:	09/10/2013	Application #:	13050260	Filing Dt:	03/17/2011
Publication #:	US20110230068	Pub Dt:	09/22/2011
Title:	COMPONENT COMPRISING A CHIP IN A CAVITY AND A STRESS-REDUCED ATTACHMENT

Patent #:	8432007	Issue Dt:	04/30/2013	Application #:	13075936	Filing Dt:	03/30/2011
Publication #:	US20110186943	Pub Dt:	08/04/2011
Title:	MEMS PACKAGE AND METHOD FOR THE PRODUCTION THEREOF

Patent #:	9061888	Issue Dt:	06/23/2015	Application #:	13190732	Filing Dt:	07/26/2011
Publication #:	US20110298064	Pub Dt:	12/08/2011
Title:	SENSOR MODULE AND METHOD FOR PRODUCING SENSOR MODULES

Patent #:	8571239	Issue Dt:	10/29/2013	Application #:	13282668	Filing Dt:	10/27/2011
Publication #:	US20120093346	Pub Dt:	04/19/2012
Title:	MEMS MICROPHONE

Patent #:	9143851	Issue Dt:	09/22/2015	Application #:	13289862	Filing Dt:	11/04/2011
Publication #:	US20120114145	Pub Dt:	05/10/2012
Title:	Microphone Arrangement

Patent #:	9056760	Issue Dt:	06/16/2015	Application #:	13520923	Filing Dt:	07/06/2012
Publication #:	US20130119492	Pub Dt:	05/16/2013
Title:	Miniaturized Electrical Component Comprising an MEMS and an ASIC and Production Method

Patent #:	8664733	Issue Dt:	03/04/2014	Application #:	13579433	Filing Dt:	09/07/2012
Publication #:	US20120326249	Pub Dt:	12/27/2012
Title:	MEMS MICROPHONE AND METHOD FOR MANUFACTURE

Patent #:	9084366	Issue Dt:	07/14/2015	Application #:	13698350	Filing Dt:	01/28/2013
Publication #:	US20130121523	Pub Dt:	05/16/2013
Title:	ELECTRIC COMPONENT HAVING A SHALLOW PHYSICAL SHAPE, AND METHOD OF MANUFACTURE

Patent #:	8865499	Issue Dt:	10/21/2014	Application #:	13805630	Filing Dt:	02/13/2013
Publication #:	US20130140656	Pub Dt:	06/06/2013
Title:	MEMS MICROPHONE AND METHOD FOR PRODUCING THE MEMS MICROPHONE

Patent #:	9357294	Issue Dt:	05/31/2016	Application #:	13980700	Filing Dt:	09/23/2013
Publication #:	US20140003609	Pub Dt:	01/02/2014
Title:	MICROPHONE ARRANGEMENT

Patent #:	9369066	Issue Dt:	06/14/2016	Application #:	13983947	Filing Dt:	10/28/2013
Publication #:	US20140035434	Pub Dt:	02/06/2014
Title:	MEMS DEVICE COMPRISING AN UNDER BUMP METALLIZATION

Patent #:	9197967	Issue Dt:	11/24/2015	Application #:	14002500	Filing Dt:	10/23/2013
Publication #:	US20140037121	Pub Dt:	02/06/2014
Title:	Microphone and Method to Position a Membrane Between Two Backplates

Patent #:	9133016	Issue Dt:	09/15/2015	Application #:	14171989	Filing Dt:	02/04/2014
Publication #:	US20140145276	Pub Dt:	05/29/2014
Title:	MEMS MICROPHONE AND METHOD FOR MANUFACTURE

Assignor

EPCOS AG

Exec Dt:

11/01/2016

Assignee

TDK CORPORATION

3-9-1 SHIBAURA

MINATO-KU

TOKYO, JAPAN 108-0023

Correspondence name and address
	JUSTIN D. SWINDELLS
	NIXON PEABODY LLP
	70 WEST MADISON STREET
	CHICAGO, IL 60602

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