|
Total properties:
31
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2002
|
Application #:
|
09160017
|
Filing Dt:
|
09/24/1998
|
|
Title:
|
HIGH PHOTON ENERGY RANGE REFLECTED LIGHT CHARACTERIZATION OF SOLIDS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2001
|
Application #:
|
09318035
|
Filing Dt:
|
05/25/1999
|
|
Title:
|
ULTRATHIN LAYER MEASUREMENT HAVING A CONTROLLED AMBIENT OF LIGHT PATH
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2001
|
Application #:
|
09461658
|
Filing Dt:
|
12/14/1999
|
|
Title:
|
ANGLE OF INCIDENCE ACCURACY IN ULTRATHIN DIELECTRIC LAYER ELLIPSOMETRY MEASUREMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/27/2006
|
Application #:
|
10668642
|
Filing Dt:
|
09/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/06/2005
| | | | |
|
Title:
|
VACUUM ULTRAVIOLET REFLECTOMETER SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/01/2008
|
Application #:
|
10668644
|
Filing Dt:
|
09/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/06/2005
| | | | |
|
Title:
|
VACUUM ULTRAVIOLET REFERENCING REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2006
|
Application #:
|
10669030
|
Filing Dt:
|
09/23/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/06/2005
| | | | |
|
Title:
|
SEMICONDUCTOR PROCESSING TECHNIQUES UTILIZING VACUUM ULTRAVIOLET REFLECTOMETER
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/24/2006
|
Application #:
|
10909126
|
Filing Dt:
|
07/30/2004
|
|
Publication #:
|
|
Pub Dt:
|
01/13/2005
| | | | |
|
Title:
|
BROAD BAND REFERENCING REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2008
|
Application #:
|
10930219
|
Filing Dt:
|
08/31/2004
|
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR PERFORMING HIGHLY ACCURATE THIN FILM MEASUREMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/2010
|
Application #:
|
10930339
|
Filing Dt:
|
08/31/2004
|
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF VUV REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/18/2007
|
Application #:
|
11412802
|
Filing Dt:
|
04/27/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/31/2006
| | | | |
|
Title:
|
VACUUM ULTRAVIOLET REFLECTOMETER HAVING COLLIMATED BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2007
|
Application #:
|
11412810
|
Filing Dt:
|
04/27/2006
|
|
Publication #:
|
|
Pub Dt:
|
09/21/2006
| | | | |
|
Title:
|
VACUUM ULTRAVIOLET REFLECTOMETER INTEGRATED WITH PROCESSING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2007
|
Application #:
|
11418827
|
Filing Dt:
|
05/05/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/31/2009
|
Application #:
|
11418846
|
Filing Dt:
|
05/05/2006
|
|
Publication #:
|
|
Pub Dt:
|
08/09/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2008
|
Application #:
|
11517894
|
Filing Dt:
|
09/08/2006
|
|
Publication #:
|
|
Pub Dt:
|
02/08/2007
| | | | |
|
Title:
|
Vacuum ultra-violet reflectometer with stray light correction
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2008
|
Application #:
|
11600413
|
Filing Dt:
|
11/16/2006
|
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/24/2009
|
Application #:
|
11600414
|
Filing Dt:
|
11/16/2006
|
|
Publication #:
|
|
Pub Dt:
|
03/27/2008
| | | | |
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
11600477
|
Filing Dt:
|
11/16/2006
|
|
Publication #:
|
|
Pub Dt:
|
01/07/2010
| | | | |
|
Title:
|
CONTAMINATION MONITORING AND CONTROL TECHNIQUES FOR USE WITH AN OPTICAL METROLOGY INSTRUMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2009
|
Application #:
|
11711482
|
Filing Dt:
|
02/27/2007
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
|
Title:
|
PRISM SPECTROMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/2010
|
Application #:
|
11711592
|
Filing Dt:
|
02/27/2007
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
|
Title:
|
SPECTROMETER WITH COLLIMATED INPUT LIGHT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/25/2009
|
Application #:
|
11711908
|
Filing Dt:
|
02/27/2007
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2008
| | | | |
|
Title:
|
SPECTROMETER WITH MOVEABLE DETECTOR ELEMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
11789686
|
Filing Dt:
|
04/25/2007
|
|
Publication #:
|
|
Pub Dt:
|
09/20/2007
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ACCURATE CALIBRATION OF A REFLECTOMETER BY USING A RELATIVE REFLECTANCE MEASUREMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2008
|
Application #:
|
11800026
|
Filing Dt:
|
05/03/2007
|
|
Publication #:
|
|
Pub Dt:
|
02/21/2008
| | | | |
|
Title:
|
BROAD BAND REFERENCING REFLECTOMETER
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11998263
|
Filing Dt:
|
11/29/2007
|
|
Publication #:
|
|
Pub Dt:
|
06/05/2008
| | | | |
|
Title:
|
Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12072878
|
Filing Dt:
|
02/28/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/03/2009
| | | | |
|
Title:
|
Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12080947
|
Filing Dt:
|
04/07/2008
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2008
| | | | |
|
Title:
|
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12231350
|
Filing Dt:
|
09/02/2008
|
|
Publication #:
|
|
Pub Dt:
|
01/01/2009
| | | | |
|
Title:
|
Broad band referencing reflectometer
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/10/2012
|
Application #:
|
12454837
|
Filing Dt:
|
05/22/2009
|
|
Publication #:
|
|
Pub Dt:
|
11/25/2010
| | | | |
|
Title:
|
AUTOMATED CALIBRATION METHODOLOGY FOR VUV METROLOGY SYSTEM
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12584203
|
Filing Dt:
|
09/01/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/05/2012
| | | | |
|
Title:
|
Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sample
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2011
|
Application #:
|
12590151
|
Filing Dt:
|
11/03/2009
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2010
| | | | |
|
Title:
|
BROAD BAND REFERENCING REFLECTOMETER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2011
|
Application #:
|
12592641
|
Filing Dt:
|
11/30/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/08/2010
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR USING MULTIPLE RELATIVE REFLECTANCE MEASUREMENTS TO DETERMINE PROPERTIES OF A SAMPLE USING VACUUM ULTRA VIOLET WAVELENGTHS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2011
|
Application #:
|
12592773
|
Filing Dt:
|
12/02/2009
|
|
Publication #:
|
|
Pub Dt:
|
07/15/2010
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR OPTICALLY MEASURING PERIODIC STRUCTURES USING ORTHOGONAL AZIMUTHAL SAMPLE ORIENTATION
|
|
