Patent Assignment Details
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Reel/Frame: | 025783/0808 | |
| Pages: | 4 |
| | Recorded: | 02/14/2011 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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12737310
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Filing Dt:
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01/19/2011
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Publication #:
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Pub Dt:
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05/12/2011
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Title:
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Temperature adjusting mechanism and semiconductor manufacturing Appratus using temperature adjusting mechanism
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Assignee
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3-1, AKASAKA 5-CHOME |
MINATO-KU TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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SHIRIN BOZORGUI ET AL
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8765 AERO DRIVE, SUITE 312
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SAN DIEGO, CA 92123
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