Patent Assignment Details
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| Reel/Frame: | 011063/0815 | |
| Pages: | 8 |
| | Recorded: | 09/06/2000 | | |
| Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT CORRESPONDCE PREVIOUSLY RECORDED ON REEL 010236, FRAME 0003. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09391357
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Filing Dt:
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09/08/1999
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Title:
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METHOD FOR PREVENTING AN ELECTROSTATIC CHUCK FROM BEING CORRODED DURING A CLEANING PROCESS
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN ROAD 2 |
| HSIN-CHU, TAIWAN R.O.C |
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Correspondence name and address
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WINSTON HSU
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3F, NO. 52, LANE 46, MING-SHENG RD.
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234 YUNGHO CITY, TAIPEI HSIEN
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TAIWAN, R.O.C.
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