Patent Assignment Details
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Reel/Frame: | 006654/0819 | |
| Pages: | 2 |
| | Recorded: | 07/28/1993 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/12/1995
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Application #:
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08070118
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Filing Dt:
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05/28/1993
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Title:
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APPARATUS AND METHOD FOR REAL-TIME MEASUREMENT OF THIN FILM LAYER THICKNESS AND CHANGES THEREOF
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Assignee
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ROOM E32-300 |
77 MASSACHUSETTS AVE. |
CAMBRIDGE, MASSACHUSETTS 02139 |
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Correspondence name and address
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STEVEN J. WEISSBURG
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238 MAIN STREET, SUITE 303
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CAMBRIDGE, MA 02142
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