Patent Assignment Details
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| Reel/Frame: | 041717/0821 | |
| Pages: | 3 |
| | Recorded: | 03/24/2017 | | |
| Attorney Dkt #: | 2857.5380001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/22/2018
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Application #:
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15358321
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Filing Dt:
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11/22/2016
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Publication #:
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Pub Dt:
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06/01/2017
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Title:
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Metrology Target, Method and Apparatus, Computer Program and Lithographic System
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Assignee
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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