Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 015648/0829 | |
| Pages: | 3 |
| | Recorded: | 07/30/2004 | | |
| Attorney Dkt #: | 8054-63 (AW9043US/MH) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/2009
|
Application #:
|
10909238
|
Filing Dt:
|
07/30/2004
|
|
Publication #:
|
|
Pub Dt:
|
02/03/2005
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR DETECTING A PHOTOLITHOGRAPHY PROCESSING ERROR, AND METHOD AND APPARATUS FOR MONITORING A PHOTOLITHOGRAPHY PROCESS
|
|
|
Assignee
|
|
|
|
|
| 416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI |
| GYEONGGI-DO, KOREA, REPUBLIC OF |
|
|
Correspondence name and address
|
| |
F. CHAU & ASSOCIATES, LLC
|
| |
FRANK CHAU, ESQ.
|
| |
130 WOODBURY ROAD
|
| |
WOODBURY, NY 11797
|
Search Results as of:
06/20/2024 11:22 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
