Patent Assignment Details
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Reel/Frame: | 019282/0835 | |
| Pages: | 9 |
| | Recorded: | 05/11/2007 | | |
Attorney Dkt #: | UNAX-38890US1 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11549679
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Filing Dt:
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10/16/2006
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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CLEANING MEANS FOR LARGE AREA PECVD DEVICES USING A REMOTE PLASMA SOURCE
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Assignee
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IRAMALI 18 |
BALZERS, LIECHTENSTEIN LI-9496 |
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Correspondence name and address
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MICHAEL W. GARVEY
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1801 EAST 9TH STREET
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SUITE 1200
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CLEVELAND, OH 44114-3108
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