Patent Assignment Details
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Reel/Frame: | 013233/0842 | |
| Pages: | 3 |
| | Recorded: | 08/29/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09893475
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Filing Dt:
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06/29/2001
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Title:
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METHOD OF MEASURING COMBINED CRITICAL DIMENSION AND OVERLAY IN SINGLE STEP
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Assignee
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ST. MARTIN-STR. 53 |
8154 MUNICH, GERMANY |
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Correspondence name and address
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SIEMENS CORPORATION
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ELSA KELLER
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INTELLECTUAL PROPERTY DEPARTMENT
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186 WOOD AVENUE SOUTH
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ISELIN, NJ 08830
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