Patent Assignment Details
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| Reel/Frame: | 026234/0844 | |
| Pages: | 10 |
| | Recorded: | 04/15/2011 | | |
| Conveyance: | RE-RECORD TO CHANGE CORRESPONDENCE INFORMATION OF ASSIGNMENT RECORDED AT REEL/FRAME 027760/0938 |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/26/2013
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Application #:
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12403233
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Filing Dt:
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03/12/2009
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY, AS WELL AS REFLECTIVE OPTICAL ELEMENT WITH REDUCED CONTAMINATION
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Assignees
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| DE RUN 6501 |
| 5504 DR VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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WALTER OTTESEN
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PATENT ATTORNEY
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P.O. BOX 4026
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GAITHERSBURG, MARYLAND 20885-4026
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