Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 012504/0848 | |
| Pages: | 4 |
| | Recorded: | 01/18/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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09972765
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Filing Dt:
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10/05/2001
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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TRENCH ETCH PROCESS FOR LOW-K DIELECTRICS
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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LAM RESEARCH CORPORATION
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MICHAEL S. BRANDT
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4650 CUSHING PARKWAY, CA-1
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FREMONT, CALIFORNIA 94538
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