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Reel/Frame:026544/0850   Pages: 3
Recorded: 07/05/2011
Attorney Dkt #:17979-0188002
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE PREVIOUSLY RECORDED ON REEL 026535 FRAME 0706. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT ASSIGNEE IS CARL ZEISS SMT AG.
Total properties: 1
1
Patent #:
Issue Dt:
12/24/2013
Application #:
13173560
Filing Dt:
06/30/2011
Publication #:
Pub Dt:
10/27/2011
Title:
MICROLITHOGRAPHY PROJECTION SYSTEM WITH AN ACCESSIBLE DIAPHRAGM OR APERTURE STOP
Assignor
1
Exec Dt:
10/02/2007
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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