Patent Assignment Details
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| Reel/Frame: | 013934/0854 | |
| Pages: | 2 |
| | Recorded: | 11/15/2002 | | |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10294817
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Filing Dt:
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11/15/2002
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Publication #:
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Pub Dt:
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05/22/2003
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Title:
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INTERFEROMETRIC ALIGNMENT SYSTEM FOR USE IN VACUUM-BASED LITHOGRAPHIC APPARATUS
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Assignee
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| DE RUN 1110 |
| 5503 LA VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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JOHN P. DARLING
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1600 TYSONS BOULEVARD
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INTELLECTUAL PROPERTY GROUP
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MCLEAN, VA 22102
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