Patent Assignment Details
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Reel/Frame: | 008141/0861 | |
| Pages: | 3 |
| | Recorded: | 07/24/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08687150
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Filing Dt:
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07/24/1996
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Title:
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GAS INTRUDUCTION SHOWERHEAD FOR AN RTP CHAMBER WITH UPPER ZND LOWER TRANSPARENT PLATES AND GAS FLOW THEREBETWEEN
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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FISH & RICHARDSON P.C.
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ERIC L. PRAHL
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225 FRANKLIN STREET
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BOSTON, MA 02110-2804
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