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Patent Assignment Details
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Reel/Frame:018891/0863   Pages: 3
Recorded: 02/15/2007
Attorney Dkt #:UCF-50001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 5
1
Patent #:
Issue Dt:
09/14/2004
Application #:
10157222
Filing Dt:
05/28/2002
Publication #:
Pub Dt:
12/04/2003
Title:
TARGET STEERING SYSTEM FOR EUV DROPLET GENERATORS
2
Patent #:
Issue Dt:
02/15/2005
Application #:
10157540
Filing Dt:
05/28/2002
Publication #:
Pub Dt:
12/04/2003
Title:
DROPLET TARGET DELIVERY METHOD FOR HIGH PULSE-RATE LASER-PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE
3
Patent #:
Issue Dt:
12/28/2004
Application #:
10269760
Filing Dt:
10/11/2002
Publication #:
Pub Dt:
04/15/2004
Title:
LOW VAPOR PRESSURE, LOW DEBRIS SOLID TARGET FOR EUV PRODUCTION
4
Patent #:
Issue Dt:
06/28/2005
Application #:
10289086
Filing Dt:
11/06/2002
Publication #:
Pub Dt:
05/06/2004
Title:
EROSION REDUCTION FOR EUV LASER PRODUCED PLASMA TARGET SOURCES
5
Patent #:
Issue Dt:
03/08/2005
Application #:
10317402
Filing Dt:
12/11/2002
Publication #:
Pub Dt:
06/17/2004
Title:
DROPLET AND FILAMENT TARGET STABILIZER FOR EUV SOURCE NOZZLES
Assignor
1
Exec Dt:
01/22/2007
Assignees
1
12201 RESEARCH PARKWAY
ORLANDO, FLORIDA 32826
2
2200 MISSION COLLEGE BLVD.
SANTA CLARA, CALIFORNIA 95052
Correspondence name and address
JOHN A. MILLER
P.O. BOX 70098
AUBURN HILLS, MI 48326

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