Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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Reel/Frame: | 018891/0863 | |
| Pages: | 3 |
| | Recorded: | 02/15/2007 | | |
Attorney Dkt #: | UCF-50001 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
5
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10157222
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Filing Dt:
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05/28/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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TARGET STEERING SYSTEM FOR EUV DROPLET GENERATORS
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Patent #:
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Issue Dt:
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02/15/2005
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Application #:
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10157540
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Filing Dt:
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05/28/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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DROPLET TARGET DELIVERY METHOD FOR HIGH PULSE-RATE LASER-PLASMA EXTREME ULTRAVIOLET LIGHT SOURCE
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Patent #:
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Issue Dt:
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12/28/2004
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Application #:
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10269760
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Filing Dt:
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10/11/2002
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Publication #:
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Pub Dt:
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04/15/2004
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Title:
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LOW VAPOR PRESSURE, LOW DEBRIS SOLID TARGET FOR EUV PRODUCTION
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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10289086
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Filing Dt:
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11/06/2002
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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EROSION REDUCTION FOR EUV LASER PRODUCED PLASMA TARGET SOURCES
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Patent #:
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Issue Dt:
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03/08/2005
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Application #:
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10317402
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Filing Dt:
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12/11/2002
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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DROPLET AND FILAMENT TARGET STABILIZER FOR EUV SOURCE NOZZLES
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Assignees
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12201 RESEARCH PARKWAY |
ORLANDO, FLORIDA 32826 |
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2200 MISSION COLLEGE BLVD. |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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JOHN A. MILLER
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P.O. BOX 70098
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AUBURN HILLS, MI 48326
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