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Total properties:
27
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Patent #:
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Issue Dt:
|
07/02/2013
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Application #:
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12859672
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Filing Dt:
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08/19/2010
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Title:
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TRANSDUCER STRUCTURE AND METHOD FOR MEMS DEVICES
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Patent #:
|
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Issue Dt:
|
10/28/2014
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Application #:
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13163672
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Filing Dt:
|
06/18/2011
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Title:
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METHOD AND STRUCTURE OF AN INERTIAL SENSOR USING TILT CONVERSION
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|
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Patent #:
|
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Issue Dt:
|
03/01/2016
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Application #:
|
13788503
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Filing Dt:
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03/07/2013
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Publication #:
|
|
Pub Dt:
|
09/12/2013
| | | | |
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Title:
|
METHODS AND STRUCTURES OF INTEGRATED MEMS-CMOS DEVICES
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|
|
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Patent #:
|
|
Issue Dt:
|
06/28/2016
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Application #:
|
13922539
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Filing Dt:
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06/20/2013
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Publication #:
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Pub Dt:
|
08/27/2015
| | | | |
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Title:
|
TRANSDUCER STRUCTURE AND METHOD FOR MEMS DEVICES
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|
|
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Patent #:
|
|
Issue Dt:
|
12/06/2016
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Application #:
|
14158756
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Filing Dt:
|
01/17/2014
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Publication #:
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Pub Dt:
|
10/01/2015
| | | | |
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Title:
|
INTEGRATED MEMS INERTIAL SENSING DEVICE WITH AUTOMATIC GAIN CONTROL
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|
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|
Patent #:
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Issue Dt:
|
04/04/2017
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Application #:
|
14158765
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Filing Dt:
|
01/17/2014
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|
Publication #:
|
|
Pub Dt:
|
10/01/2015
| | | | |
|
Title:
|
INTEGRATED INERTIAL SENSING DEVICE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
01/10/2017
|
Application #:
|
14160549
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Filing Dt:
|
01/21/2014
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|
Publication #:
|
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Pub Dt:
|
10/01/2015
| | | | |
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Title:
|
MULTI-AXIS INTEGRATED INERTIAL SENSING DEVICE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/20/2018
|
Application #:
|
14162718
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Filing Dt:
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01/23/2014
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Publication #:
|
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Pub Dt:
|
10/23/2014
| | | | |
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Title:
|
MULTI-AXIS INTEGRATED MEMS INERTIAL SENSING DEVICE ON SINGLE PACKAGED CHIP
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|
|
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Patent #:
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|
Issue Dt:
|
07/31/2018
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Application #:
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14163789
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Filing Dt:
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01/24/2014
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Publication #:
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Pub Dt:
|
10/23/2014
| | | | |
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Title:
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MULTI-AXIS MEMS RATE SENSOR DEVICE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
05/16/2017
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Application #:
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14222575
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Filing Dt:
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03/21/2014
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Publication #:
|
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Pub Dt:
|
10/02/2014
| | | | |
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Title:
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WAFER LEVEL CENTRIFUGE FOR MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
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|
|
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Patent #:
|
|
Issue Dt:
|
09/12/2017
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Application #:
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14267864
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Filing Dt:
|
05/01/2014
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|
Publication #:
|
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Pub Dt:
|
10/08/2015
| | | | |
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Title:
|
CENTRIFUGE MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/11/2019
|
Application #:
|
14289494
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Filing Dt:
|
05/28/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
|
Title:
|
CENTRIFUGE MEMS STICTION TEST SYSTEM AND METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/07/2015
|
Application #:
|
14297337
|
Filing Dt:
|
06/05/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/11/2014
| | | | |
|
Title:
|
METHOD AND STRUCTURE OF AN INTEGRATED MEMS INERTIAL SENSOR DEVICE USING ELECTROSTATIC QUADRATURE-CANCELLATION
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|
|
|
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Patent #:
|
|
Issue Dt:
|
08/14/2018
|
Application #:
|
14302385
|
Filing Dt:
|
06/11/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/18/2014
| | | | |
|
Title:
|
MEMS STRUCTURE WITH IMPROVED SHIELDING AND METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/02/2016
|
Application #:
|
14521441
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Filing Dt:
|
10/22/2014
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|
Publication #:
|
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Pub Dt:
|
04/23/2015
| | | | |
|
Title:
|
METHOD AND DEVICE OF MEMS PROCESS CONTROL MONITORING AND PACKAGED MEMS WITH DIFFERENT CAVITY PRESSURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/28/2016
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Application #:
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14794722
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Filing Dt:
|
07/08/2015
|
|
Title:
|
SYNCHRONOUS MODULATION RESONATOR WITH SIGMA DELTA MODULATOR
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/22/2019
|
Application #:
|
14887622
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Filing Dt:
|
10/20/2015
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
|
Title:
|
METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/08/2017
|
Application #:
|
14887631
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Filing Dt:
|
10/20/2015
|
|
Publication #:
|
|
Pub Dt:
|
02/11/2016
| | | | |
|
Title:
|
METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2018
|
Application #:
|
14930642
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Filing Dt:
|
11/02/2015
|
|
Publication #:
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|
Pub Dt:
|
02/25/2016
| | | | |
|
Title:
|
MEMS STRUCTURE WITH IMPROVED SHIELDING AND METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/09/2019
|
Application #:
|
14977481
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Filing Dt:
|
12/21/2015
|
|
Publication #:
|
|
Pub Dt:
|
04/21/2016
| | | | |
|
Title:
|
METHOD AND DEVICE OF MEMS PROCESS CONTROL MONITORING AND PACKAGED MEMS WITH DIFFERENT CAVITY PRESSURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2018
|
Application #:
|
14985388
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Filing Dt:
|
12/30/2015
|
|
Publication #:
|
|
Pub Dt:
|
06/23/2016
| | | | |
|
Title:
|
METHODS AND STRUCTURES OF INTEGRATED MEMS-CMOS DEVICES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/23/2019
|
Application #:
|
14987685
|
Filing Dt:
|
01/04/2016
|
|
Title:
|
METHOD TO TEST THE QUALITY FACTOR OF A MEMS GYROSCOPE AT CHIP PROBE
|
|
|
|
|
Patent #:
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|
Issue Dt:
|
08/27/2019
|
Application #:
|
15365851
|
Filing Dt:
|
11/30/2016
|
|
Publication #:
|
|
Pub Dt:
|
03/23/2017
| | | | |
|
Title:
|
INTEGRATED MEMS INERTIAL SENSING DEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/23/2018
|
Application #:
|
15442488
|
Filing Dt:
|
02/24/2017
|
|
Publication #:
|
|
Pub Dt:
|
06/15/2017
| | | | |
|
Title:
|
INTEGRATED INERTIAL SENSING DEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2018
|
Application #:
|
15479154
|
Filing Dt:
|
04/04/2017
|
|
Publication #:
|
|
Pub Dt:
|
10/05/2017
| | | | |
|
Title:
|
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/20/2021
|
Application #:
|
15917505
|
Filing Dt:
|
03/09/2018
|
|
Title:
|
ULTRA-LOW POWER SENSOR SYSTEMS FOR VIBRATION & MOTION DETECTION
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/19/2019
|
Application #:
|
16102592
|
Filing Dt:
|
08/13/2018
|
|
Publication #:
|
|
Pub Dt:
|
12/06/2018
| | | | |
|
Title:
|
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
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