Patent Assignment Details
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Reel/Frame: | 012642/0867 | |
| Pages: | 4 |
| | Recorded: | 04/30/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/11/2005
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Application #:
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10119862
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Filing Dt:
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04/10/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD OF REDUCING IN-TRENCH SMEARING DURING POLISHING
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Assignee
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870 NORTH COMMONS DRIVE |
AURORA, ILLINOIS 60504 |
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Correspondence name and address
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CABOT MICROELECTRONICS CORPORATION
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PHYLLIS T. TURNER-BRIM, ESQ.
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870 NORTH COMMONS DRIVE
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AURORA, ILLINOIS 60504
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