Patent Assignment Details
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| Reel/Frame: | 025085/0870 | |
| Pages: | 2 |
| | Recorded: | 10/04/2010 | | |
| Attorney Dkt #: | 1857.6010001 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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12892733
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Filing Dt:
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09/28/2010
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Publication #:
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Pub Dt:
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01/20/2011
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Title:
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Lithographic Apparatus Configured to Compensate for Variations in a Critical Dimension of Projected Features Due to Heating of Optical Elements
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Assignee
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20005
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