Total properties:
29
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Patent #:
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Issue Dt:
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11/04/2008
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Application #:
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10971530
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Filing Dt:
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10/22/2004
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Publication #:
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Pub Dt:
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07/28/2005
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Title:
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METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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05/25/2010
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Application #:
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10971729
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Filing Dt:
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10/22/2004
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Publication #:
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Pub Dt:
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04/28/2005
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Title:
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METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11265543
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Filing Dt:
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11/02/2005
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Publication #:
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Pub Dt:
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05/25/2006
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Title:
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BALANCING PRESSURE TO IMPROVE A FLUID SEAL
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Patent #:
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Issue Dt:
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09/29/2015
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Application #:
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11716538
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Filing Dt:
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03/09/2007
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Publication #:
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Pub Dt:
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09/11/2008
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Title:
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Substrate processing pallet with cooling
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Patent #:
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Issue Dt:
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04/23/2013
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Application #:
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12702860
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Filing Dt:
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02/09/2010
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Publication #:
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Pub Dt:
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08/26/2010
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Title:
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WETTING A WORKPIECE SURFACE IN A FLUID-PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/25/2017
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Application #:
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12755198
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Filing Dt:
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04/06/2010
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Publication #:
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Pub Dt:
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10/06/2011
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Title:
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SEED LAYER DEPOSITION IN MICROSCALE FEATURES
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Patent #:
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Issue Dt:
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10/18/2011
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Application #:
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12786219
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Filing Dt:
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05/24/2010
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Publication #:
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Pub Dt:
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11/25/2010
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Title:
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METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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05/01/2012
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Application #:
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12790264
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Filing Dt:
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05/28/2010
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Publication #:
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Pub Dt:
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12/02/2010
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Title:
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BALANCING PRESSURE TO IMPROVE A FLUID SEAL
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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12963991
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Filing Dt:
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12/09/2010
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Publication #:
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Pub Dt:
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06/16/2011
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Title:
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METHOD FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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10/02/2012
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Application #:
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13275158
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Filing Dt:
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10/17/2011
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Publication #:
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Pub Dt:
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05/03/2012
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Title:
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METHOD AND APPARATUS FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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12/24/2013
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Application #:
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13279405
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Filing Dt:
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10/24/2011
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Publication #:
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Pub Dt:
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01/10/2013
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Title:
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SUBSTRATE LOADER AND UNLOADER HAVING A BERNOULLI SUPPORT
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Patent #:
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Issue Dt:
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08/25/2015
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Application #:
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13279414
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Filing Dt:
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10/24/2011
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Publication #:
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Pub Dt:
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01/10/2013
| | | | |
Title:
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SUBSTRATE LOADER AND UNLOADER HAVING AN AIR BEARING SUPPORT
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13279432
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Filing Dt:
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10/24/2011
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Publication #:
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Pub Dt:
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01/10/2013
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Title:
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SUBSTRATE LOADER AND UNLOADER
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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13356252
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Filing Dt:
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01/23/2012
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Publication #:
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Pub Dt:
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12/27/2012
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Title:
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SUBSTRATE HOLDER
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Patent #:
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Issue Dt:
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04/28/2015
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Application #:
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13445217
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Filing Dt:
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04/12/2012
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Publication #:
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Pub Dt:
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11/29/2012
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Title:
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ELECTRO CHEMICAL DEPOSITION AND REPLENISHMENT APPARATUS
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Patent #:
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Issue Dt:
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04/14/2015
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Application #:
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13445457
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Filing Dt:
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04/12/2012
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Publication #:
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Pub Dt:
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11/29/2012
| | | | |
Title:
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Electro chemical deposition and replenishment apparatus
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Patent #:
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Issue Dt:
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09/20/2016
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Application #:
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13488090
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Filing Dt:
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06/04/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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02/09/2016
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Application #:
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13488297
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Filing Dt:
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06/04/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM WITH ALIGNMENT FEATURES ON A PROCESS SECTION FRAME
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Patent #:
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Issue Dt:
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11/29/2016
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Application #:
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13488329
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Filing Dt:
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06/04/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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PARALLEL SINGLE SUBSTRATE MARANGONI MODULE
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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13488343
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Filing Dt:
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06/04/2012
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Publication #:
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Pub Dt:
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12/06/2012
| | | | |
Title:
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PARALLEL SINGLE SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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10/14/2014
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Application #:
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13595785
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Filing Dt:
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08/27/2012
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Publication #:
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Pub Dt:
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02/28/2013
| | | | |
Title:
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EDGE BEVEL REMOVAL APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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09/27/2016
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Application #:
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13967891
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Filing Dt:
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08/15/2013
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Publication #:
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Pub Dt:
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12/19/2013
| | | | |
Title:
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APPARATUS FOR FLUID PROCESSING A WORKPIECE
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Patent #:
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Issue Dt:
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04/05/2016
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Application #:
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14076610
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Filing Dt:
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11/11/2013
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Publication #:
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Pub Dt:
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05/14/2015
| | | | |
Title:
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ELECTROCHEMICAL DEPOSITION APPARATUS WITH REMOTE CATHOLYTE FLUID MANAGEMENT
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14308420
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Filing Dt:
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06/18/2014
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Publication #:
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Pub Dt:
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02/12/2015
| | | | |
Title:
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METHOD FOR INCREASING ADHESION OF COPPER TO POLYMERIC SURFACES
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Patent #:
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Issue Dt:
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05/02/2017
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Application #:
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14321053
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Filing Dt:
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07/01/2014
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Publication #:
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Pub Dt:
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01/08/2015
| | | | |
Title:
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ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING THE CHEMISTRY THEREIN
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Patent #:
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Issue Dt:
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06/05/2018
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Application #:
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14321146
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Filing Dt:
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07/01/2014
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Publication #:
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Pub Dt:
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01/08/2015
| | | | |
Title:
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ELECTROCHEMICAL DEPOSITION APPARATUS AND METHODS FOR CONTROLLING THE CHEMISTRY THEREIN
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Patent #:
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Issue Dt:
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05/07/2019
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Application #:
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15193595
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Filing Dt:
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06/27/2016
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Publication #:
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Pub Dt:
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12/28/2017
| | | | |
Title:
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WORKPIECE HOLDER FOR A WET PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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09/11/2018
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Application #:
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15193890
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Filing Dt:
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06/27/2016
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Publication #:
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Pub Dt:
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12/28/2017
| | | | |
Title:
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WORKPIECE LOADER FOR A WET PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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11/16/2021
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Application #:
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16568575
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Filing Dt:
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09/12/2019
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Publication #:
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Pub Dt:
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03/19/2020
| | | | |
Title:
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BATCH PROCESSING SYSTEM WITH VACUUM ISOLATION
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