Patent Assignment Details
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| Reel/Frame: | 012149/0879 | |
| Pages: | 4 |
| | Recorded: | 09/10/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/07/2004
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Application #:
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09701854
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Filing Dt:
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02/15/2001
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Title:
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METHOD AND SYSTEM FOR CLEANING SEMICONDUCTOR ELEMENTS
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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TESTA, HURWITZ & THIBEAULT, LLP
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JOSEPH A. CAPRARO, JR
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HIGH STREET TOWER
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125 HIGH STREET
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BOSTON, MA 02110
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