Total properties:
41
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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09130996
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Filing Dt:
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08/07/1998
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Publication #:
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Pub Dt:
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02/14/2002
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Title:
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VISUAL INSPECTION AND VERIFICATION SYSTEM
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09746369
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Filing Dt:
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12/20/2000
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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STRUCTURE AND METHOD OF CORRECTING PROXIMITY EFFECTS IN A TRI-TONE ATTENUATED PHASE-SHIFTING MASK
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09810823
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Filing Dt:
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03/16/2001
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Publication #:
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Pub Dt:
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09/19/2002
| | | | |
Title:
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SELF-ALIGNED FABRICATION TECHNIQUE FOR TRI-TONE ATTENUATED PHASE-SHIFTING MASKS
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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09814023
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Filing Dt:
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03/20/2001
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Publication #:
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Pub Dt:
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11/07/2002
| | | | |
Title:
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SYSTEM AND METHOD OF PROVIDING MASK DEFECT PRINTABILITY ANALYSIS
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09816619
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Filing Dt:
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03/23/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Title:
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BLANK FOR ALTERNATING PSM PHOTOMASK WITH CHARGE DISSIPATION LAYER
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09905420
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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01/16/2003
| | | | |
Title:
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ALTERNATING PHASE SHIFT MASK DESIGN CONFLICT RESOLUTION
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09917581
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Filing Dt:
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07/27/2001
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Publication #:
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Pub Dt:
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01/30/2003
| | | | |
Title:
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METHOD AND APPARATUS FOR ALLOWING PHASE CONFLICTS IN PHASE SHIFTING MASK AND CHROMELESS PHASE EDGES
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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09941453
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Filing Dt:
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08/28/2001
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Publication #:
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Pub Dt:
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03/06/2003
| | | | |
Title:
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SYSTEM AND METHOD FOR INDENTIFYING DUMMY FEATURES ON A MASK LAYER
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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09945012
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Filing Dt:
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08/31/2001
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Publication #:
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Pub Dt:
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03/06/2003
| | | | |
Title:
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MICROLOADING EFFECT CORRECTION
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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09974507
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Filing Dt:
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10/09/2001
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Publication #:
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Pub Dt:
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04/10/2003
| | | | |
Title:
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SYSTEM AND METHOD FOR CORRECTING 3D EFFECTS IN AN ALTERNATING PHASE-SHIFTING MASK
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Patent #:
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Issue Dt:
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12/13/2005
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Application #:
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10003358
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Filing Dt:
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11/14/2001
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Publication #:
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Pub Dt:
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05/15/2003
| | | | |
Title:
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SIMULATION USING DESIGN GEOMETRY INFORMATION
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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10005615
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Filing Dt:
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11/07/2001
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Publication #:
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Pub Dt:
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05/08/2003
| | | | |
Title:
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METHOD OF INCORPORATING LENS ABERRATION INFORMATION INTO VARIOUS PROCESS FLOWS
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Patent #:
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Issue Dt:
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08/01/2006
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Application #:
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10025414
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Filing Dt:
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12/18/2001
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Publication #:
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Pub Dt:
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06/19/2003
| | | | |
Title:
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METHOD FOR PROVIDING FLEXIBLE AND DYNAMIC REPORTING CAPABILITY USING SIMULATION TOOLS
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10033511
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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06/26/2003
| | | | |
Title:
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SIMULATION-BASED FEED FORWARD PROCESS CONTROL
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Patent #:
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Issue Dt:
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01/02/2007
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Application #:
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10040055
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Filing Dt:
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12/31/2001
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Publication #:
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Pub Dt:
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08/28/2003
| | | | |
Title:
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SHAPE-BASED GEOMETRY ENGINE TO PERFORM SMOOTHING AND OTHER LAYOUT BEAUTIFICATION OPERATIONS
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10116660
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Filing Dt:
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04/03/2002
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Publication #:
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Pub Dt:
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10/09/2003
| | | | |
Title:
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AUTOMATED FLOW IN PSM PHASE ASSIGNMENT
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Patent #:
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Issue Dt:
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09/13/2005
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Application #:
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10116661
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Filing Dt:
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04/03/2002
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Publication #:
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Pub Dt:
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10/09/2003
| | | | |
Title:
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SYSTEM AND METHOD TO DETERMINE IMPACT OF LINE END SHORTENING
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Patent #:
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|
Issue Dt:
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10/11/2005
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Application #:
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10137828
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Filing Dt:
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05/01/2002
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Publication #:
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Pub Dt:
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11/06/2003
| | | | |
Title:
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METHOD AND SYSTEM FOR SIMULATING RESIST AND ETCH EDGES
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Patent #:
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Issue Dt:
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12/20/2005
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Application #:
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10165550
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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10/17/2002
| | | | |
Title:
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DESIGN DATA FORMAT AND HIERARCHY MANAGEMENT FOR PHASE PROCESSING
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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10165557
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Filing Dt:
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06/07/2002
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Publication #:
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Pub Dt:
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10/24/2002
| | | | |
Title:
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STANDARD CELL DESIGN INCORPORATING PHASE INFORMATION
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10171066
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Filing Dt:
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06/11/2002
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Publication #:
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Pub Dt:
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12/11/2003
| | | | |
Title:
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MODEL-BASED DATA CONVERSION
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Patent #:
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|
Issue Dt:
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02/14/2006
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Application #:
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10208891
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Filing Dt:
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07/29/2002
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Publication #:
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Pub Dt:
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01/29/2004
| | | | |
Title:
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REPETITION RECOGNITION USING SEGMENTS
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10243629
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
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03/18/2004
| | | | |
Title:
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SOFT DEFECT PRINTABILITY SIMULATION AND ANALYSIS FOR MASKS
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Patent #:
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|
Issue Dt:
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10/19/2004
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Application #:
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10253204
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Filing Dt:
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09/23/2002
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Publication #:
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Pub Dt:
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03/25/2004
| | | | |
Title:
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ACCELERATED LAYOUT PROCESSING USING OPC PRE-PROCESSING
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Patent #:
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Issue Dt:
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09/21/2004
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Application #:
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10268874
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Filing Dt:
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10/09/2002
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Publication #:
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Pub Dt:
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04/15/2004
| | | | |
Title:
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PHASE SHIFTING MASK TOPOGRAPHY EFFECT CORRECTION BASED ON NEAR-FIELD IMAGE PROPERTIES
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Patent #:
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|
Issue Dt:
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02/13/2007
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Application #:
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10272104
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Filing Dt:
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10/15/2002
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Publication #:
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Pub Dt:
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03/20/2003
| | | | |
Title:
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ALTERNATING PHASE SHIFT MASK DESIGN CONFLICT RESOLUTION
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Patent #:
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|
Issue Dt:
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02/28/2006
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Application #:
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10282483
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Filing Dt:
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10/28/2002
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Publication #:
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Pub Dt:
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04/29/2004
| | | | |
Title:
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MASK REPAIR USING MULTIPLE EXPOSURES
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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10295160
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Filing Dt:
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11/14/2002
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Publication #:
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Pub Dt:
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08/28/2003
| | | | |
Title:
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CRITICAL DIMENSION CONTROL USING FULL PHASE AND TRIM MASKS
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10295575
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Filing Dt:
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11/14/2002
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Publication #:
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Pub Dt:
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04/10/2003
| | | | |
Title:
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FULL PHASE SHIFTING MASK IN DAMASCENE PROCESS
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Patent #:
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Issue Dt:
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02/07/2012
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Application #:
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10313706
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
Title:
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METHOD FOR FACILITATING AUTOMATIC ANALYSIS OF DEFECT PRINTABILITY
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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10316275
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Filing Dt:
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12/10/2002
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Publication #:
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Pub Dt:
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06/10/2004
| | | | |
Title:
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IDENTIFYING PHANTOM IMAGES GENERATED BY SIDE-LOBES
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Patent #:
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Issue Dt:
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12/19/2006
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Application #:
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10316280
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Filing Dt:
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12/10/2002
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Publication #:
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Pub Dt:
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06/05/2003
| | | | |
Title:
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REFERENCE IMAGE GENERATION FROM SUBJECT IMAGE FOR PHOTOLITHOGRAPHY MASK ANALYSIS
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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10323565
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Filing Dt:
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12/17/2002
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Publication #:
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Pub Dt:
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05/08/2003
| | | | |
Title:
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VERIFICATION UTILIZING INSTANCE-BASED HIERARCHY MANAGEMENT
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Patent #:
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Issue Dt:
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06/07/2005
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Application #:
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10327446
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Filing Dt:
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12/20/2002
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Publication #:
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Pub Dt:
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06/24/2004
| | | | |
Title:
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INCREMENTAL LITHOGRAPHY MASK LAYOUT DESIGN AND VERIFICATION
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Patent #:
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Issue Dt:
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12/12/2006
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Application #:
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10335513
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Filing Dt:
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12/30/2002
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Publication #:
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Pub Dt:
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07/01/2004
| | | | |
Title:
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LITHOGRAPHY PROCESS MODELING OF ASYMMETRIC PATTERNS
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Patent #:
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Issue Dt:
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12/27/2005
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Application #:
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10340377
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Filing Dt:
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01/10/2003
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Publication #:
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Pub Dt:
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07/24/2003
| | | | |
Title:
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CUTTING PATTERNS FOR FULL PHASE SHIFTING MASKS
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Patent #:
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|
Issue Dt:
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08/09/2005
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Application #:
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10364260
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Filing Dt:
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02/11/2003
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Publication #:
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Pub Dt:
|
08/12/2004
| | | | |
Title:
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SIMULATION BASED PSM CLEAR DEFECT REPAIR METHOD AND SYSTEM
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10420951
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Filing Dt:
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04/21/2003
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Publication #:
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Pub Dt:
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10/21/2004
| | | | |
Title:
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MASK COST DRIVEN LOGIC OPTIMIZATION AND SYNTHESIS
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Patent #:
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Issue Dt:
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06/26/2007
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Application #:
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10658933
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Filing Dt:
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09/09/2003
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Publication #:
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Pub Dt:
|
03/11/2004
| | | | |
Title:
|
STRUCTURE AND METHOD OF CORRECTING PROXIMITY EFFECTS IN A TRI-TONE ATTENUATED PHASE-SHIFTING MASK
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|
|
Patent #:
|
|
Issue Dt:
|
12/14/2004
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Application #:
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10685751
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Filing Dt:
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10/14/2003
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Publication #:
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|
Pub Dt:
|
04/22/2004
| | | | |
Title:
|
SYSTEM AND METHOD FOR CORRECTING 3D EFFECTS IN AN ALTERNATING PHASE-SHIFTING MASK
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|
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Patent #:
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|
Issue Dt:
|
01/16/2007
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Application #:
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10844987
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Filing Dt:
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05/12/2004
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Publication #:
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Pub Dt:
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10/21/2004
| | | | |
Title:
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MODEL-BASED DATA CONVERSION
|
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