Patent Assignment Details
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Reel/Frame: | 011685/0883 | |
| Pages: | 2 |
| | Recorded: | 04/04/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09824775
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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Multi-beam exposure apparatus using a multi-axis electron lens, fabrication method a semiconductor device
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Assignee
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1-32-1 ASAHI-CHO NERIMA-KU |
TOKYO, JAPAN |
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Correspondence name and address
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PILLSBURY WINTHROP, LLP
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GLENN J. PERRY
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1100 NEW YORK AVENUE, N.W., 9TH FLOOR
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WASHINGTON, DC 20005-3918
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