Patent Assignment Details
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Reel/Frame: | 012978/0887 | |
| Pages: | 6 |
| | Recorded: | 06/07/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10112138
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Filing Dt:
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03/29/2002
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Publication #:
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Pub Dt:
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01/30/2003
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Title:
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POLARIMETRIC SCATTEROMETER FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES
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Assignee
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1250 RELIANCE WAY |
FREMONT, CALIFORNIA 94539 |
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Correspondence name and address
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LAW OFFICES OF THOMAS SCHNECK
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THOMAS SCHNECK
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P.O. BOX 2-E
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SAN JOSE, C.A. 95109-0005
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