Patent Assignment Details
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| Reel/Frame: | 017464/0887 | |
| Pages: | 6 |
| | Recorded: | 01/17/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10643820
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Filing Dt:
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08/19/2003
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Publication #:
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Pub Dt:
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08/12/2004
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Title:
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CONFIGURATION AND A METHOD FOR REDUCING CONTAMINATION WITH PARTICLES ON A SUBSTRATE IN A PROCESS TOOL
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Assignees
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| ST.-MARTIN-STRASSE 53 |
| MUENCHEN, GERMANY 81669 |
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| KONIGSBRUCKER STR. 180 |
| DRESDEN, GERMANY 01099 |
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| 1303 EAST ALGONQUIN ROAD |
| SCHAUMBURG, ILLINOIS 60169 |
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Correspondence name and address
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LERNER AND GREENBERG
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P.O. BOX 2480
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HOLLYWOOD, FL 33022
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