Patent Assignment Details
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| Reel/Frame: | 005209/0892 | |
| Pages: | 1 |
| | Recorded: | 12/27/1989 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/19/1992
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Application #:
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07457347
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Filing Dt:
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12/27/1989
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Title:
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DEPOSITION APPARATUS AND METHOD FOR ENHANCING STEP COVERAGE AND PLANARIZATION ON SEMICONDUCTOR WAFERS
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Assignee
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| 25 EASTMANS ROAD, A CORP. OF NJ |
| PARSIPPANY, NEW JERSEY 07054 |
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Correspondence name and address
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LERNER, DAVID, LITTENBERG, KRUMHOLZ
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& MENTLIK
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600 SOUTH AVENUE WEST
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WESTIFIELD, NJ 07090
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