Patent Assignment Details
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Reel/Frame: | 006061/0892 | |
| Pages: | 5 |
| | Recorded: | 03/05/1992 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/01/1994
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Application #:
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07846590
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Filing Dt:
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03/05/1992
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Title:
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PHOTOLITHOGRAPHY CONTROL SYSTEM AND METHOD USING LATENT IMAGE MEASUREMENTS
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Assignee
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2900 SEMICONDUCTOR DRIVE |
SANTA CLARA, CALIFORNIA 95052-8090 |
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Correspondence name and address
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FLEHR, HOHBACH, TEST,
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ALBRITTON & HERBERT
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PAULA N. CHAVEZ
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SUITE 3400, FOUR EMBARCADERO CENTER
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SAN FRANCISCO, CA 94111-4187
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